High order noise shaping filters for high performance inertial sensors
High order noise shaping filters for high performance inertial sensors
Micromachined inertial sensors that have been incorporated in sigma-delta force-feedback loops have been proven to improve linearity, dynamic range, and bandwidth, and also provide a direct digital output. Previous work mainly focused on using the sensing element only to form a second-order single-loop sigma-delta modulator (SigmaDeltaM); however, the advantages of higher order single-loop electromechanical SigmaDeltaM have not been fully explored. High-performance inertial sensors require higher signal-to-quantization noise ratio (SQNR). This paper presents topologies for higher order single-loop electromechanical SigmaDeltaM with optimal stable coefficients that lead to a better SQNR. The topologies have good immunity to fabrication tolerances, which was verified by Monte Carlo analysis. The topologies are applicable not only to accelerometers but also to other inertial sensors such as gyroscopes.
1666-1674
Dong, Y
3ddd523d-3ff2-40ee-9011-64589eb85aba
Kraft, M
54927621-738f-4d40-af56-a027f686b59f
Redman-White, W
d5376167-c925-460f-8e9c-13bffda8e0bf
October 2007
Dong, Y
3ddd523d-3ff2-40ee-9011-64589eb85aba
Kraft, M
54927621-738f-4d40-af56-a027f686b59f
Redman-White, W
d5376167-c925-460f-8e9c-13bffda8e0bf
Dong, Y, Kraft, M and Redman-White, W
(2007)
High order noise shaping filters for high performance inertial sensors.
IEEE Transactions on Instrumentation and Measurement, 56 (5), .
(doi:10.1109/TIM.2007.904477).
Abstract
Micromachined inertial sensors that have been incorporated in sigma-delta force-feedback loops have been proven to improve linearity, dynamic range, and bandwidth, and also provide a direct digital output. Previous work mainly focused on using the sensing element only to form a second-order single-loop sigma-delta modulator (SigmaDeltaM); however, the advantages of higher order single-loop electromechanical SigmaDeltaM have not been fully explored. High-performance inertial sensors require higher signal-to-quantization noise ratio (SQNR). This paper presents topologies for higher order single-loop electromechanical SigmaDeltaM with optimal stable coefficients that lead to a better SQNR. The topologies have good immunity to fabrication tolerances, which was verified by Monte Carlo analysis. The topologies are applicable not only to accelerometers but also to other inertial sensors such as gyroscopes.
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e-pub ahead of print date: 17 September 2007
Published date: October 2007
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 260048
URI: http://eprints.soton.ac.uk/id/eprint/260048
ISSN: 0018-9456
PURE UUID: 232cccf2-a26a-4aaa-8701-384bef20719e
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Date deposited: 25 Oct 2004
Last modified: 14 Mar 2024 06:31
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Author:
Y Dong
Author:
M Kraft
Author:
W Redman-White
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