Modelling squeeze film effects in a MEMS accelerometer with levitated proof mass.


Houlihan, R and Kraft, M (2004) Modelling squeeze film effects in a MEMS accelerometer with levitated proof mass. Journal of Micromech Microeng, 15, (5), pp. 803-902.

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Item Type: Article
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 260050
Date :
Date Event
2004Published
Date Deposited: 27 Oct 2004
Last Modified: 17 Apr 2017 22:19
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/260050

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