Houlihan, R and Kraft, M (2004) Modelling squeeze film effects in a MEMS accelerometer with levitated proof mass. Journal of Micromech Microeng, 15 (5), 803-902.
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Published date: 2004
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 260050
URI: http://eprints.soton.ac.uk/id/eprint/260050
PURE UUID: fe58c787-819d-4cf5-ab38-407e47905bd5
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Date deposited: 27 Oct 2004
Last modified: 10 Dec 2021 21:08
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Contributors
Author:
R Houlihan
Author:
M Kraft
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