Novel fabrication methods for submicrometer Josephson junction qubits
Novel fabrication methods for submicrometer Josephson junction qubits
Novel processes for the fabrication of mesoscopic Josephson junction qubits have been developed, based on superconducting Al/Al2O3/Al tunnel junctions. These are fabricated by electron beam lithography using single-layer and multi-layer resists, and standard processes that are compatible with conventional CMOS processing. The new single-layer resist process is found to have significant advantages over conventional fabrication methods using suspended tri-layer shadow masks.
289-293
Potts, A.
a3c70ecc-a6ad-4a82-b871-0303479b1020
Routley, P.R.
f4d380d9-54c2-4e4d-8eb8-d8ce26bca987
Parker, Gregory J.
edf88b88-ba05-48a5-8ae4-d6d6aa984364
de Groot, Peter A. J.
98c21141-cf90-4e5c-8f2b-d2aae8efb84d
June 2001
Potts, A.
a3c70ecc-a6ad-4a82-b871-0303479b1020
Routley, P.R.
f4d380d9-54c2-4e4d-8eb8-d8ce26bca987
Parker, Gregory J.
edf88b88-ba05-48a5-8ae4-d6d6aa984364
de Groot, Peter A. J.
98c21141-cf90-4e5c-8f2b-d2aae8efb84d
Potts, A., Routley, P.R., Parker, Gregory J. and de Groot, Peter A. J.
(2001)
Novel fabrication methods for submicrometer Josephson junction qubits.
Journal of Materials Science: Materials in Electronics, 12 (4-6), .
(doi:10.1023/A:1011279908265).
Abstract
Novel processes for the fabrication of mesoscopic Josephson junction qubits have been developed, based on superconducting Al/Al2O3/Al tunnel junctions. These are fabricated by electron beam lithography using single-layer and multi-layer resists, and standard processes that are compatible with conventional CMOS processing. The new single-layer resist process is found to have significant advantages over conventional fabrication methods using suspended tri-layer shadow masks.
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Published date: June 2001
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 260364
URI: http://eprints.soton.ac.uk/id/eprint/260364
PURE UUID: 3f9ea64a-e7ab-4176-8262-27cb5e4ff34b
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Date deposited: 25 Jan 2005
Last modified: 14 Mar 2024 06:37
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Author:
A. Potts
Author:
P.R. Routley
Author:
Gregory J. Parker
Author:
Peter A. J. de Groot
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