A Novel Process for Depostion of Aluminium onto Sidewalls of Silicon Trenches


Sehr, H., Evans, A.G.R., Brunnschweiler, A. and Ensell, G.J. (2000) A Novel Process for Depostion of Aluminium onto Sidewalls of Silicon Trenches At Microfabrication 2000, United States.

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Item Type: Conference or Workshop Item (Other)
Additional Information: Event Dates: September 2000
Venue - Dates: Microfabrication 2000, United States, 2000-09-01
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 260446
Date :
Date Event
2000Published
Date Deposited: 07 Feb 2005
Last Modified: 17 Apr 2017 22:14
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/260446

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