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A Novel Process for Deposition of Aluminium onto Sidewalls of Silicon Trenches

Sehr, H., Evans, A.G.R., Brunnschweiler, A. and Ensell, G.J. (2000) A Novel Process for Deposition of Aluminium onto Sidewalls of Silicon Trenches At Microfabrication 2000, United States.

Record type: Conference or Workshop Item (Other)

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Published date: 2000
Additional Information: Event Dates: September 2000
Venue - Dates: Microfabrication 2000, United States, 2000-09-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 260446
URI: http://eprints.soton.ac.uk/id/eprint/260446
PURE UUID: ec48bccc-1d2f-4738-9e87-2af34407c118

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Date deposited: 07 Feb 2005
Last modified: 18 Jul 2017 09:12

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Contributors

Author: H. Sehr
Author: A.G.R. Evans
Author: A. Brunnschweiler
Author: G.J. Ensell

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