Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane


(2001) Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane Journal of Micromechanics and Microengineering, 11, (4), pp. 311-318.

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Item Type: Article
Additional Information: Event Dates: October 2000
ePrint ID: 260449
Date Deposited: 07 Feb 2005
Last Modified: 27 Mar 2014 20:03
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/260449

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