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Time constant and lateral resonances of thermal vertical bimorph actuators

Sehr, H, Tomlin, I.S., Huang, B., Beeby, S.P., Evans, A.G.R., Brunnschweiler, A., Ensell, G., Schabmueller, C.J.G. and Niblock, T.E.G. (2002) Time constant and lateral resonances of thermal vertical bimorph actuators Journal of Micromechanics and Microengineering, 12, (4), pp. 410-413.

Record type: Article

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Published date: 2002
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 260456
URI: http://eprints.soton.ac.uk/id/eprint/260456
ISSN: 0960-1317
PURE UUID: 44086c52-69b1-45a3-873a-f5813eb4f0d4

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Date deposited: 07 Feb 2005
Last modified: 18 Jul 2017 09:12

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Contributors

Author: H Sehr
Author: I.S. Tomlin
Author: B. Huang
Author: S.P. Beeby
Author: A.G.R. Evans
Author: A. Brunnschweiler
Author: G. Ensell
Author: C.J.G. Schabmueller
Author: T.E.G. Niblock

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