Characterisation of a highly sensitive ultra-thin piezoresitive silicon cantilever probe and it's application in gas flow velocity sensing


Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G. (2002) Characterisation of a highly sensitive ultra-thin piezoresitive silicon cantilever probe and it's application in gas flow velocity sensing Journal of Micromechanics and Microengineering, 12, (6), pp. 780-785.

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Item Type: Article
ISSNs: 0960-1317 (print)
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 260457
Date :
Date Event
2002Published
Date Deposited: 07 Feb 2005
Last Modified: 17 Apr 2017 22:14
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/260457

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