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Characterisation of a highly sensitive ultra-thin piezoresitive silicon cantilever probe and it's application in gas flow velocity sensing

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Citation

Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G. (2002) Characterisation of a highly sensitive ultra-thin piezoresitive silicon cantilever probe and it's application in gas flow velocity sensing Journal of Micromechanics and Microengineering, 12, (6), pp. 780-785.

More information

Published date: 2002
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 260457
URI: http://eprints.soton.ac.uk/id/eprint/260457
ISSN: 0960-1317
PURE UUID: ba69ba20-ce54-4b82-8527-ad5cafc58c53

Catalogue record

Date deposited: 07 Feb 2005
Last modified: 18 Jul 2017 09:12

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Contributors

Author: Y. Su
Author: A.G.R. Evans
Author: A. Brunnschweiler
Author: G. Ensell

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