Fabrication of a highly efficient optical modulator based on SOI
Fabrication of a highly efficient optical modulator based on SOI
Silicon-on-insulator (SOI) technology offers tremendous potential for the integration of optoelectronic functions on a silicon substrate. In this research, we report on the fabrication process of a Mach-Zehnder interferometer on an SOI with 0.5μm wide waveguides in a Si layer of the order of ~1μm thick. These small dimensions increase the speed of these devices. However, with these small dimensions several fabrication difficulties such as alignment and thickness accuracy are present.
495-501
Atta, R.H.M.
d0fa3f49-7bb4-4de8-bd15-d9888dd53fed
Ensell, G.
736a04bf-1a14-42c2-928b-ed7af799cd3a
Evans, A.G.R.
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Png, C.E.
ed888ad9-41f4-4ecb-83f6-c8f7ac652c2f
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
2003
Atta, R.H.M.
d0fa3f49-7bb4-4de8-bd15-d9888dd53fed
Ensell, G.
736a04bf-1a14-42c2-928b-ed7af799cd3a
Evans, A.G.R.
082f720d-3830-46d7-ba87-b058af733bc3
Png, C.E.
ed888ad9-41f4-4ecb-83f6-c8f7ac652c2f
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Atta, R.H.M., Ensell, G., Evans, A.G.R., Png, C.E. and Reed, G.T.
(2003)
Fabrication of a highly efficient optical modulator based on SOI.
SPIE, , Maspalomas, Spain.
19 - 23 May 2003.
.
(doi:10.1117/12.498967).
Record type:
Conference or Workshop Item
(Paper)
Abstract
Silicon-on-insulator (SOI) technology offers tremendous potential for the integration of optoelectronic functions on a silicon substrate. In this research, we report on the fabrication process of a Mach-Zehnder interferometer on an SOI with 0.5μm wide waveguides in a Si layer of the order of ~1μm thick. These small dimensions increase the speed of these devices. However, with these small dimensions several fabrication difficulties such as alignment and thickness accuracy are present.
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Published date: 2003
Venue - Dates:
SPIE, , Maspalomas, Spain, 2003-05-19 - 2003-05-23
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 260462
URI: http://eprints.soton.ac.uk/id/eprint/260462
PURE UUID: cb2c0bf6-e01e-4680-afc3-d92fec9efcd8
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Date deposited: 07 Feb 2005
Last modified: 14 Mar 2024 06:38
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Contributors
Author:
R.H.M. Atta
Author:
G. Ensell
Author:
A.G.R. Evans
Author:
C.E. Png
Author:
G.T. Reed
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