Screen Printed PZT Composite Thick Films
Screen Printed PZT Composite Thick Films
Composite film (ComFi) technology has been developed as an alternative technique to achieve thick (5–100 ?m) films at temperatures compatible with silicon processing. The technique entails producing a composite slurry consisting of PZT powder and a PZT producing sol. The slurry is then deposited onto the substrate, dried and fired at 710°C. Intermediate sol infiltration and pyrolysis can be used to increase the density and improve the functional properties of the films. A slurry suitable for screen printing has been developed and used to print PZT thick films. The dielectric and piezoelectric properties of the screen printed material are presented. Material properties of the screen printed ComFi material were found to be comparable to, or exceeded, those observed in traditional screen printed materials.
Screen printing, piezoelectric thick-films
89-92
Dorey, R
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Whatmore, R
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Beeby, S
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Torah, R
7147b47b-db01-4124-95dc-90d6a9842688
White, N
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
2004
Dorey, R
e698fdd7-6bae-477a-aa8e-c2064b57f4ff
Whatmore, R
ba616f9c-0e1d-493e-bc36-dd091237f61d
Beeby, S
ba565001-2812-4300-89f1-fe5a437ecb0d
Torah, R
7147b47b-db01-4124-95dc-90d6a9842688
White, N
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Dorey, R, Whatmore, R, Beeby, S, Torah, R and White, N
(2004)
Screen Printed PZT Composite Thick Films.
Integrated Ferroelectrics, 63, .
Abstract
Composite film (ComFi) technology has been developed as an alternative technique to achieve thick (5–100 ?m) films at temperatures compatible with silicon processing. The technique entails producing a composite slurry consisting of PZT powder and a PZT producing sol. The slurry is then deposited onto the substrate, dried and fired at 710°C. Intermediate sol infiltration and pyrolysis can be used to increase the density and improve the functional properties of the films. A slurry suitable for screen printing has been developed and used to print PZT thick films. The dielectric and piezoelectric properties of the screen printed material are presented. Material properties of the screen printed ComFi material were found to be comparable to, or exceeded, those observed in traditional screen printed materials.
Text
Int_Ferroelectrics_63,_2003,_Dorey_et_al.pdf
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More information
Published date: 2004
Keywords:
Screen printing, piezoelectric thick-films
Organisations:
EEE
Identifiers
Local EPrints ID: 260476
URI: http://eprints.soton.ac.uk/id/eprint/260476
ISSN: 1058-4587
PURE UUID: a0eedba7-b302-43e5-8601-51576824aed0
Catalogue record
Date deposited: 08 Feb 2005
Last modified: 15 Mar 2024 03:20
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Contributors
Author:
R Dorey
Author:
R Whatmore
Author:
S Beeby
Author:
R Torah
Author:
N White
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