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Screen Printed PZT Composite Thick Films

Dorey, R, Whatmore, R, Beeby, S, Torah, R and White, N (2004) Screen Printed PZT Composite Thick Films Integrated Ferroelectrics, 63, pp. 89-92.

Record type: Article


Composite film (ComFi) technology has been developed as an alternative technique to achieve thick (5–100 ?m) films at temperatures compatible with silicon processing. The technique entails producing a composite slurry consisting of PZT powder and a PZT producing sol. The slurry is then deposited onto the substrate, dried and fired at 710°C. Intermediate sol infiltration and pyrolysis can be used to increase the density and improve the functional properties of the films. A slurry suitable for screen printing has been developed and used to print PZT thick films. The dielectric and piezoelectric properties of the screen printed material are presented. Material properties of the screen printed ComFi material were found to be comparable to, or exceeded, those observed in traditional screen printed materials.

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Published date: 2004
Keywords: Screen printing, piezoelectric thick-films
Organisations: EEE


Local EPrints ID: 260476
ISSN: 1058-4587
PURE UUID: a0eedba7-b302-43e5-8601-51576824aed0
ORCID for S Beeby: ORCID iD
ORCID for N White: ORCID iD

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Date deposited: 08 Feb 2005
Last modified: 18 Jul 2017 09:12

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Author: R Dorey
Author: R Whatmore
Author: S Beeby ORCID iD
Author: R Torah
Author: N White ORCID iD

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