Screen Printed PZT Composite Thick Films

Dorey, R, Whatmore, R, Beeby, S, Torah, R and White, N (2004) Screen Printed PZT Composite Thick Films Integrated Ferroelectrics, 63, pp. 89-92.


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Composite film (ComFi) technology has been developed as an alternative technique to achieve thick (5–100 ?m) films at temperatures compatible with silicon processing. The technique entails producing a composite slurry consisting of PZT powder and a PZT producing sol. The slurry is then deposited onto the substrate, dried and fired at 710°C. Intermediate sol infiltration and pyrolysis can be used to increase the density and improve the functional properties of the films. A slurry suitable for screen printing has been developed and used to print PZT thick films. The dielectric and piezoelectric properties of the screen printed material are presented. Material properties of the screen printed ComFi material were found to be comparable to, or exceeded, those observed in traditional screen printed materials.

Item Type: Article
ISSNs: 1058-4587 (print)
Related URLs:
Keywords: Screen printing, piezoelectric thick-films
Organisations: EEE
ePrint ID: 260476
Date :
Date Event
Date Deposited: 08 Feb 2005
Last Modified: 17 Apr 2017 22:14
Further Information:Google Scholar

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