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Micromachined silicon Generator for Harvesting Power from Vibrations

Micromachined silicon Generator for Harvesting Power from Vibrations
Micromachined silicon Generator for Harvesting Power from Vibrations
This paper describes the design, simulation and fabrication of an electromagnetic device for generating electrical energy from vibrations. A range of dimensions has been simulated using ANSYS in order to determine natural frequencies and material stresses. A 300µm wide paddle beam gives a natural frequency of 6.4 kHz for the mode of operation and induced stresses at maximum amplitudes are well within material limits. Ansoft's Maxwell 2D has been used to predict the voltages generated and an integrated electroplated coil of 71 turns produces 0.38V with no load. Devices are currently being fabricated and the process is described.
Vibration energy harvesting, MEMS energy generator
104-107
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
Koukharenko, E
b34ae878-2776-4088-8880-5b2bd4f33ec3
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
O'Donnell, T
9122a8f1-90bf-457e-ad26-0585f36bbf90
Saha, C
e5a92d80-da7c-45a0-9725-f95794603a85
Kulkarni, S
2b1c5dc6-423a-43a7-931d-5fdfa04cad9c
Roy, S
e666eef6-02d8-4e39-bd06-2402d3cf77ec
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
Koukharenko, E
b34ae878-2776-4088-8880-5b2bd4f33ec3
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
O'Donnell, T
9122a8f1-90bf-457e-ad26-0585f36bbf90
Saha, C
e5a92d80-da7c-45a0-9725-f95794603a85
Kulkarni, S
2b1c5dc6-423a-43a7-931d-5fdfa04cad9c
Roy, S
e666eef6-02d8-4e39-bd06-2402d3cf77ec

Beeby, S P, Tudor, M J, Koukharenko, E, White, N M, O'Donnell, T, Saha, C, Kulkarni, S and Roy, S (2004) Micromachined silicon Generator for Harvesting Power from Vibrations. At The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2004) The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2004), Japan. pp. 104-107.

Record type: Conference or Workshop Item (Poster)

Abstract

This paper describes the design, simulation and fabrication of an electromagnetic device for generating electrical energy from vibrations. A range of dimensions has been simulated using ANSYS in order to determine natural frequencies and material stresses. A 300µm wide paddle beam gives a natural frequency of 6.4 kHz for the mode of operation and induced stresses at maximum amplitudes are well within material limits. Ansoft's Maxwell 2D has been used to predict the voltages generated and an integrated electroplated coil of 71 turns produces 0.38V with no load. Devices are currently being fabricated and the process is described.

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More information

Published date: 2004
Additional Information: Event Dates: 28-30th November 2004
Venue - Dates: The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2004), Japan, 2004-11-30
Keywords: Vibration energy harvesting, MEMS energy generator
Organisations: EEE

Identifiers

Local EPrints ID: 260483
URI: https://eprints.soton.ac.uk/id/eprint/260483
PURE UUID: 8a4973aa-afb8-4fc0-9783-0c2af7999a6c
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 08 Feb 2005
Last modified: 06 Jun 2018 13:12

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