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Effect of Fluorine Implantation Dose on Boron Transient Enhanced Diffusion and Boron Thermal Diffusion in Si1-xGex

Effect of Fluorine Implantation Dose on Boron Transient Enhanced Diffusion and Boron Thermal Diffusion in Si1-xGex
Effect of Fluorine Implantation Dose on Boron Transient Enhanced Diffusion and Boron Thermal Diffusion in Si1-xGex
fluorine, diffusion, TED, boron diffusion, SiGe
518-526
El Mubarek, H.A.W.
08195505-5e00-40a6-bc9f-ebbf2a2fbf63
Karunaratne, M.
7da7bee0-ae56-4298-9afd-87a72615c8eb
Bonar, J.M.
12d01a95-92f9-4aa1-bce0-c857451cbbfe
Dilliway, G.D.
755ac5bd-9e6f-45f6-ac19-7ce284d48b0e
Wang, Y.
23c775f0-3cac-44d5-9e16-2098959c493b
Hemment, P.L.F.
198ac06e-1c48-4422-a3a4-de753f22dec3
Willoughby, A.F.
854f065f-d9bd-41ca-a89c-dff19b6eba3b
Ashburn, P.
68cef6b7-205b-47aa-9efb-f1f09f5c1038
El Mubarek, H.A.W.
08195505-5e00-40a6-bc9f-ebbf2a2fbf63
Karunaratne, M.
7da7bee0-ae56-4298-9afd-87a72615c8eb
Bonar, J.M.
12d01a95-92f9-4aa1-bce0-c857451cbbfe
Dilliway, G.D.
755ac5bd-9e6f-45f6-ac19-7ce284d48b0e
Wang, Y.
23c775f0-3cac-44d5-9e16-2098959c493b
Hemment, P.L.F.
198ac06e-1c48-4422-a3a4-de753f22dec3
Willoughby, A.F.
854f065f-d9bd-41ca-a89c-dff19b6eba3b
Ashburn, P.
68cef6b7-205b-47aa-9efb-f1f09f5c1038

El Mubarek, H.A.W., Karunaratne, M., Bonar, J.M., Dilliway, G.D., Wang, Y., Hemment, P.L.F., Willoughby, A.F. and Ashburn, P. (2005) Effect of Fluorine Implantation Dose on Boron Transient Enhanced Diffusion and Boron Thermal Diffusion in Si1-xGex. IEEE Transactions on Electron Devices, 52 (4), 518-526.

Record type: Article
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2005MubarekSiGeDosePaper.pdf - Other
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More information

Published date: April 2005
Keywords: fluorine, diffusion, TED, boron diffusion, SiGe
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 260750
URI: https://eprints.soton.ac.uk/id/eprint/260750
PURE UUID: c98df115-f4c0-4b7b-9541-6dcc7040cee9

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Date deposited: 14 Apr 2005
Last modified: 02 Dec 2019 21:08

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