The University of Southampton
University of Southampton Institutional Repository

Analytical model of micromachining of brittle materials with sharp particles

Analytical model of micromachining of brittle materials with sharp particles
Analytical model of micromachining of brittle materials with sharp particles
We present an analytical model for the powder blasting of brittle materials with sharp particles. We developed a continuum equation, which describes the surface evolution during the powder blasting, into which we introduced surface energetics as the major relaxation mechanism. The experimental and the calculated erosion rates match extremely well. Also, the developed model explains why the sidewalls of a power blasted channel are not straight, e.g. have a blast lag, for which we also found a good agreement between experiments and theory.
0026-2692
608-611
Moktadir, Zak
2c4bc910-ec7b-40d0-8070-4fb45b173bcc
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Moktadir, Zak
2c4bc910-ec7b-40d0-8070-4fb45b173bcc
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f

Moktadir, Zak and Kraft, Michael (2005) Analytical model of micromachining of brittle materials with sharp particles. Microelectronics Journal, 36 (3-6), 608-611.

Record type: Article

Abstract

We present an analytical model for the powder blasting of brittle materials with sharp particles. We developed a continuum equation, which describes the surface evolution during the powder blasting, into which we introduced surface energetics as the major relaxation mechanism. The experimental and the calculated erosion rates match extremely well. Also, the developed model explains why the sidewalls of a power blasted channel are not straight, e.g. have a blast lag, for which we also found a good agreement between experiments and theory.

This record has no associated files available for download.

More information

Published date: March 2005
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 260892
URI: http://eprints.soton.ac.uk/id/eprint/260892
ISSN: 0026-2692
PURE UUID: 8f87fac2-542b-41bc-8e4d-ae20aeff9e86

Catalogue record

Date deposited: 18 May 2005
Last modified: 08 Jan 2022 05:45

Export record

Contributors

Author: Zak Moktadir
Author: Michael Kraft

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×