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Analytical model of micromachining of brittle materials with sharp particles

Analytical model of micromachining of brittle materials with sharp particles
Analytical model of micromachining of brittle materials with sharp particles
We present an analytical model for the powder blasting of brittle materials with sharp particles. We developed a continuum equation, which describes the surface evolution during the powder blasting, into which we introduced surface energetics as the major relaxation mechanism. The experimental and the calculated erosion rates match extremely well. Also, the developed model explains why the sidewalls of a power blasted channel are not straight, e.g. have a blast lag, for which we also found a good agreement between experiments and theory.
0026-2692
608-611
Moktadir, Zak
2c4bc910-ec7b-40d0-8070-4fb45b173bcc
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Moktadir, Zak
2c4bc910-ec7b-40d0-8070-4fb45b173bcc
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f

Moktadir, Zak and Kraft, Michael (2005) Analytical model of micromachining of brittle materials with sharp particles. Microelectronics Journal, 36 (3-6), 608-611.

Record type: Article

Abstract

We present an analytical model for the powder blasting of brittle materials with sharp particles. We developed a continuum equation, which describes the surface evolution during the powder blasting, into which we introduced surface energetics as the major relaxation mechanism. The experimental and the calculated erosion rates match extremely well. Also, the developed model explains why the sidewalls of a power blasted channel are not straight, e.g. have a blast lag, for which we also found a good agreement between experiments and theory.

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More information

Published date: March 2005
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 260892
URI: https://eprints.soton.ac.uk/id/eprint/260892
ISSN: 0026-2692
PURE UUID: 8f87fac2-542b-41bc-8e4d-ae20aeff9e86

Catalogue record

Date deposited: 18 May 2005
Last modified: 16 Jul 2019 22:49

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