Houlihan, R, Kukharenka, A, Gindila, M and Kraft, M (2001) Analysis and design of a capacitive accelerometer based on an electrostatically levitated microdisk. Proceedings of SPIE, 4558, 277-286.
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Article
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More information
Published date: 2001
Organisations:
Nanoelectronics and Nanotechnology, EEE
Identifiers
Local EPrints ID: 260948
URI: http://eprints.soton.ac.uk/id/eprint/260948
ISSN: 0277-786X
PURE UUID: 648c5f9f-6463-4397-b53a-510b8de79bd8
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Date deposited: 06 Jun 2005
Last modified: 07 Jan 2022 23:58
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Contributors
Author:
R Houlihan
Author:
A Kukharenka
Author:
M Gindila
Author:
M Kraft
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