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Analysis and design of a capacitive accelerometer based on an electrostatically levitated microdisk

Analysis and design of a capacitive accelerometer based on an electrostatically levitated microdisk
Analysis and design of a capacitive accelerometer based on an electrostatically levitated microdisk
0277-786X
277-286
Houlihan, R
feb586bb-493a-4c24-ae9a-4dc955728671
Kukharenka, A
b34ae878-2776-4088-8880-5b2bd4f33ec3
Gindila, M
e8778718-774f-43fb-b6d3-4c1696643102
Kraft, M
54927621-738f-4d40-af56-a027f686b59f
Houlihan, R
feb586bb-493a-4c24-ae9a-4dc955728671
Kukharenka, A
b34ae878-2776-4088-8880-5b2bd4f33ec3
Gindila, M
e8778718-774f-43fb-b6d3-4c1696643102
Kraft, M
54927621-738f-4d40-af56-a027f686b59f

Houlihan, R, Kukharenka, A, Gindila, M and Kraft, M (2001) Analysis and design of a capacitive accelerometer based on an electrostatically levitated microdisk. Proceedings of SPIE, 4558, 277-286.

Record type: Article

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More information

Published date: 2001
Organisations: Nanoelectronics and Nanotechnology, EEE

Identifiers

Local EPrints ID: 260948
URI: http://eprints.soton.ac.uk/id/eprint/260948
ISSN: 0277-786X
PURE UUID: 648c5f9f-6463-4397-b53a-510b8de79bd8

Catalogue record

Date deposited: 06 Jun 2005
Last modified: 07 Apr 2020 16:37

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