Koukharenka, Elena and Kraft, Michael (2002) Realisation of electroplating moulds with thick positive SPR220-7 photoresist. , the 4th International Conference on Material for Microelectronics and Nanoengineering, , ESPOO, Finland. pp. 165-168 .
Record type:
Conference or Workshop Item
(Poster)
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Published date: 2002
Additional Information:
Event Dates: 2002
Venue - Dates:
, the 4th International Conference on Material for Microelectronics and Nanoengineering, , ESPOO, Finland, 2002-01-01
Organisations:
Nanoelectronics and Nanotechnology, EEE
Identifiers
Local EPrints ID: 260951
URI: http://eprints.soton.ac.uk/id/eprint/260951
PURE UUID: 8c9df054-494a-459c-a459-a3c5add4f5f0
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Date deposited: 07 Jun 2005
Last modified: 10 Dec 2021 21:14
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Contributors
Author:
Elena Koukharenka
Author:
Michael Kraft
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