The University of Southampton
University of Southampton Institutional Repository

Realisation of electroplating moulds with thick positive SPR220-7 photoresist

Realisation of electroplating moulds with thick positive SPR220-7 photoresist
Realisation of electroplating moulds with thick positive SPR220-7 photoresist
165-168
Koukharenka, Elena
b34ae878-2776-4088-8880-5b2bd4f33ec3
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Koukharenka, Elena
b34ae878-2776-4088-8880-5b2bd4f33ec3
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f

Koukharenka, Elena and Kraft, Michael (2002) Realisation of electroplating moulds with thick positive SPR220-7 photoresist. , the 4th International Conference on Material for Microelectronics and Nanoengineering, , ESPOO, Finland. pp. 165-168 .

Record type: Conference or Workshop Item (Poster)

Full text not available from this repository.

More information

Published date: 2002
Additional Information: Event Dates: 2002
Venue - Dates: , the 4th International Conference on Material for Microelectronics and Nanoengineering, , ESPOO, Finland, 2002-01-01
Organisations: Nanoelectronics and Nanotechnology, EEE

Identifiers

Local EPrints ID: 260951
URI: http://eprints.soton.ac.uk/id/eprint/260951
PURE UUID: 8c9df054-494a-459c-a459-a3c5add4f5f0

Catalogue record

Date deposited: 07 Jun 2005
Last modified: 29 Jan 2020 15:42

Export record

Contributors

Author: Elena Koukharenka
Author: Michael Kraft

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×