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Realisation of electroplating moulds with thick positive SPR220-7 photoresist

Record type: Conference or Workshop Item (Poster)

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Citation

Koukharenka, Elena and Kraft, Michael (2002) Realisation of electroplating moulds with thick positive SPR220-7 photoresist At , the 4th International Conference on Material for Microelectronics and Nanoengineering, Finland. , pp. 165-168.

More information

Published date: 2002
Additional Information: Event Dates: 2002
Venue - Dates: , the 4th International Conference on Material for Microelectronics and Nanoengineering, Finland, 2002-01-01
Organisations: Nanoelectronics and Nanotechnology, EEE

Identifiers

Local EPrints ID: 260951
URI: http://eprints.soton.ac.uk/id/eprint/260951
PURE UUID: 8c9df054-494a-459c-a459-a3c5add4f5f0

Catalogue record

Date deposited: 07 Jun 2005
Last modified: 18 Jul 2017 09:06

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Contributors

Author: Elena Koukharenka
Author: Michael Kraft

University divisions

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