Realisation of electroplating moulds with thick positive SPR220-7 photoresist


Koukharenka, Elena and Kraft, Michael (2002) Realisation of electroplating moulds with thick positive SPR220-7 photoresist At , the 4th International Conference on Material for Microelectronics and Nanoengineering, Finland. , pp. 165-168.

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Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: 2002
Venue - Dates: , the 4th International Conference on Material for Microelectronics and Nanoengineering, Finland, 2002-01-01
Organisations: Nanoelectronics and Nanotechnology, EEE
ePrint ID: 260951
Date :
Date Event
2002Published
Date Deposited: 07 Jun 2005
Last Modified: 17 Apr 2017 22:04
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/260951

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