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Design and performance of a microelectromagnetic vibration-powered generator

Design and performance of a microelectromagnetic vibration-powered generator
Design and performance of a microelectromagnetic vibration-powered generator
In this paper we report on the design, simulation and initial results of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. In this paper the development and fabrication of a micromachined microgenerator that uses standard silicon based fabrication techniques and low cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 2D software have shown voltage levels of 4 to 9V can be generated from the single beam generator designs. Initial results at atmospheric pressure yield 0.5 µW at 9.81ms-2 and 9.5 kHz and emphasise the importance of reducing unwanted loss mechanisms such as air damping.
micrmachined silicon electromagnetic power generator
0-7803-8994-8
780-783
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
Koukharenko, E
b34ae878-2776-4088-8880-5b2bd4f33ec3
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
O'Donnell, T
9122a8f1-90bf-457e-ad26-0585f36bbf90
Saha, C
e5a92d80-da7c-45a0-9725-f95794603a85
Kulkarni, S
2b1c5dc6-423a-43a7-931d-5fdfa04cad9c
Roy, S
e666eef6-02d8-4e39-bd06-2402d3cf77ec
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
Koukharenko, E
b34ae878-2776-4088-8880-5b2bd4f33ec3
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
O'Donnell, T
9122a8f1-90bf-457e-ad26-0585f36bbf90
Saha, C
e5a92d80-da7c-45a0-9725-f95794603a85
Kulkarni, S
2b1c5dc6-423a-43a7-931d-5fdfa04cad9c
Roy, S
e666eef6-02d8-4e39-bd06-2402d3cf77ec

Beeby, S P, Tudor, M J, Koukharenko, E, White, N M, O'Donnell, T, Saha, C, Kulkarni, S and Roy, S (2005) Design and performance of a microelectromagnetic vibration-powered generator. At The 13th Internation Conference on Solid-State Sensors, Actuators and Microsystems The 13th Internation Conference on Solid-State Sensors, Actuators and Microsystems. pp. 780-783.

Record type: Conference or Workshop Item (Poster)

Abstract

In this paper we report on the design, simulation and initial results of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. In this paper the development and fabrication of a micromachined microgenerator that uses standard silicon based fabrication techniques and low cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 2D software have shown voltage levels of 4 to 9V can be generated from the single beam generator designs. Initial results at atmospheric pressure yield 0.5 µW at 9.81ms-2 and 9.5 kHz and emphasise the importance of reducing unwanted loss mechanisms such as air damping.

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More information

Published date: 2005
Additional Information: Event Dates: June 5-9th
Venue - Dates: The 13th Internation Conference on Solid-State Sensors, Actuators and Microsystems, 2005-06-09
Keywords: micrmachined silicon electromagnetic power generator
Organisations: EEE

Identifiers

Local EPrints ID: 261049
URI: https://eprints.soton.ac.uk/id/eprint/261049
ISBN: 0-7803-8994-8
PURE UUID: 559cf925-54d6-4a1b-8dfe-17101914ac71
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 07 Jul 2005
Last modified: 06 Jun 2018 13:12

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