The University of Southampton
University of Southampton Institutional Repository

Design and performance of a microelectromagnetic vibration-powered generator

Record type: Conference or Workshop Item (Poster)

In this paper we report on the design, simulation and initial results of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. In this paper the development and fabrication of a micromachined microgenerator that uses standard silicon based fabrication techniques and low cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 2D software have shown voltage levels of 4 to 9V can be generated from the single beam generator designs. Initial results at atmospheric pressure yield 0.5 µW at 9.81ms-2 and 9.5 kHz and emphasise the importance of reducing unwanted loss mechanisms such as air damping.

PDF Full_paper_EA516.pdf - Other
Download (156kB)


Beeby, S P, Tudor, M J, Koukharenko, E, White, N M, O'Donnell, T, Saha, C, Kulkarni, S and Roy, S (2005) Design and performance of a microelectromagnetic vibration-powered generator At The 13th Internation Conference on Solid-State Sensors, Actuators and Microsystems. , pp. 780-783.

More information

Published date: 2005
Additional Information: Event Dates: June 5-9th
Venue - Dates: The 13th Internation Conference on Solid-State Sensors, Actuators and Microsystems, 2005-06-09
Keywords: micrmachined silicon electromagnetic power generator
Organisations: EEE


Local EPrints ID: 261049
ISBN: 0-7803-8994-8
PURE UUID: 559cf925-54d6-4a1b-8dfe-17101914ac71
ORCID for S P Beeby: ORCID iD
ORCID for N M White: ORCID iD

Catalogue record

Date deposited: 07 Jul 2005
Last modified: 18 Jul 2017 09:06

Export record


Author: S P Beeby ORCID iD
Author: M J Tudor
Author: E Koukharenko
Author: N M White ORCID iD
Author: T O'Donnell
Author: C Saha
Author: S Kulkarni
Author: S Roy

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.