Design, fabrication and simulations of microelectromagnetic vibration powered generator for low power MEMS
Design, fabrication and simulations of microelectromagnetic vibration powered generator for low power MEMS
In this paper we report on the design, simulation and fabrication of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. Previous millimetre scale electromagnetic generators have been fabricated using discrete components and traditional fabrication techniques. In this paper the development and fabrication of a micromachined microgenerator that uses standard silicon-based fabrication techniques and low-cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 2D software have shown voltage levels of 4 to 9V can be generated from the single beam generator designs.
micrmachined silicon electromagnetic power generator
2-84813-0357-1
374-379
Beeby, S P
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Tudor, M J
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Koukharenko, E
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White, N M
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O'Donnell, T
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Saha, C
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Kulkarni, S
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Roy, S
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2005
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
Koukharenko, E
b34ae878-2776-4088-8880-5b2bd4f33ec3
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
O'Donnell, T
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Saha, C
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Kulkarni, S
2b1c5dc6-423a-43a7-931d-5fdfa04cad9c
Roy, S
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Beeby, S P, Tudor, M J, Koukharenko, E, White, N M, O'Donnell, T, Saha, C, Kulkarni, S and Roy, S
(2005)
Design, fabrication and simulations of microelectromagnetic vibration powered generator for low power MEMS.
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Montreux, Switzerland.
.
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Conference or Workshop Item
(Other)
Abstract
In this paper we report on the design, simulation and fabrication of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. Previous millimetre scale electromagnetic generators have been fabricated using discrete components and traditional fabrication techniques. In this paper the development and fabrication of a micromachined microgenerator that uses standard silicon-based fabrication techniques and low-cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 2D software have shown voltage levels of 4 to 9V can be generated from the single beam generator designs.
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Final_DTIP20051_d.pdf
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Published date: 2005
Additional Information:
Event Dates: June 1-3rd
Venue - Dates:
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Montreux, Switzerland, 2005-06-03
Keywords:
micrmachined silicon electromagnetic power generator
Organisations:
EEE
Identifiers
Local EPrints ID: 261052
URI: http://eprints.soton.ac.uk/id/eprint/261052
ISBN: 2-84813-0357-1
PURE UUID: 50d62649-4bc9-43db-be9a-6aa8f5816416
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Date deposited: 07 Jul 2005
Last modified: 15 Mar 2024 02:46
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Contributors
Author:
S P Beeby
Author:
M J Tudor
Author:
E Koukharenko
Author:
N M White
Author:
T O'Donnell
Author:
C Saha
Author:
S Kulkarni
Author:
S Roy
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