Design, fabrication and simulations of microelectromagnetic vibration powered generator for low power MEMS


Beeby, S P, Tudor, M J, Koukharenko, E, White, N M, O'Donnell, T, Saha, C, Kulkarni, S and Roy, S (2005) Design, fabrication and simulations of microelectromagnetic vibration powered generator for low power MEMS At Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Switzerland. , pp. 374-379.

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Description/Abstract

In this paper we report on the design, simulation and fabrication of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. Previous millimetre scale electromagnetic generators have been fabricated using discrete components and traditional fabrication techniques. In this paper the development and fabrication of a micromachined microgenerator that uses standard silicon-based fabrication techniques and low-cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 2D software have shown voltage levels of 4 to 9V can be generated from the single beam generator designs.

Item Type: Conference or Workshop Item (Other)
Additional Information: Event Dates: June 1-3rd
Venue - Dates: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Switzerland, 2005-06-03
Keywords: micrmachined silicon electromagnetic power generator
Organisations: EEE
ePrint ID: 261052
Date :
Date Event
2005Published
Date Deposited: 07 Jul 2005
Last Modified: 17 Apr 2017 22:03
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/261052

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