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Design, fabrication and simulations of microelectromagnetic vibration powered generator for low power MEMS

Record type: Conference or Workshop Item (Other)

In this paper we report on the design, simulation and fabrication of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. Previous millimetre scale electromagnetic generators have been fabricated using discrete components and traditional fabrication techniques. In this paper the development and fabrication of a micromachined microgenerator that uses standard silicon-based fabrication techniques and low-cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 2D software have shown voltage levels of 4 to 9V can be generated from the single beam generator designs.

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Citation

Beeby, S P, Tudor, M J, Koukharenko, E, White, N M, O'Donnell, T, Saha, C, Kulkarni, S and Roy, S (2005) Design, fabrication and simulations of microelectromagnetic vibration powered generator for low power MEMS At Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Switzerland. , pp. 374-379.

More information

Published date: 2005
Additional Information: Event Dates: June 1-3rd
Venue - Dates: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Switzerland, 2005-06-03
Keywords: micrmachined silicon electromagnetic power generator
Organisations: EEE

Identifiers

Local EPrints ID: 261052
URI: http://eprints.soton.ac.uk/id/eprint/261052
ISBN: 2-84813-0357-1
PURE UUID: 50d62649-4bc9-43db-be9a-6aa8f5816416
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 07 Jul 2005
Last modified: 18 Jul 2017 09:06

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Contributors

Author: S P Beeby ORCID iD
Author: M J Tudor
Author: E Koukharenko
Author: N M White ORCID iD
Author: T O'Donnell
Author: C Saha
Author: S Kulkarni
Author: S Roy

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