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Catalyst free low temperature direct growth of carbon nanotubes on SiGe islands and Ge quantum dots

Catalyst free low temperature direct growth of carbon nanotubes on SiGe islands and Ge quantum dots
Catalyst free low temperature direct growth of carbon nanotubes on SiGe islands and Ge quantum dots
A metal catalyst free growth method of carbon nanotubes (CNTs) has been developed using chemical vapor deposition (CVD) of CNTs on carbon implanted SiGe islands on Si substrates. From SEM and Raman measurements, the fabricated CNTs are identified as single walled CNTs (SWNTs) with diameter ranging from 1.2 to 1.6 nm. Thick and curly oxide nanofibers were also obtained as a by-product of the growth process but could be dissolved using HF treatment. Essential parts of the substrate preparation after CVD SiGe growth and carbon implant are a chemical oxidization by hydrogen peroxide solution and a heat treatment at 1000 °C prior to CNT growth. We believe that these processes enhance surface decomposition and assist the formation of carbon clusters, which play a role in seeding CNT growth. Though further investigation is required to improve the density of the SWNTs, the growth technique would be a practical technique for growing metal-free CNTs for a variety of applications, while at the same time opening up the prospect of merging CNT devices into silicon VLSI technology. We will also present results that demonstrate the application of this CNT growth technique to germanium quantum dot substrates.
carbon nanotubes
Uchino, T.
706196b8-2f2c-403d-97aa-2995eac8572b
Bourdakos, K.N.
6b01a41a-dfdb-45a2-bb1c-7e8052a78de0
Ashburn, P.
68cef6b7-205b-47aa-9efb-f1f09f5c1038
de Groot, C.H.
92cd2e02-fcc4-43da-8816-c86f966be90c
Kiziroglou, M.E.
5d55ba87-ea00-47fa-917b-c1e538ae6dd2
Smith, D.C.
536ad98e-9c71-4171-a7b5-51d796090e5d
Uchino, T.
706196b8-2f2c-403d-97aa-2995eac8572b
Bourdakos, K.N.
6b01a41a-dfdb-45a2-bb1c-7e8052a78de0
Ashburn, P.
68cef6b7-205b-47aa-9efb-f1f09f5c1038
de Groot, C.H.
92cd2e02-fcc4-43da-8816-c86f966be90c
Kiziroglou, M.E.
5d55ba87-ea00-47fa-917b-c1e538ae6dd2
Smith, D.C.
536ad98e-9c71-4171-a7b5-51d796090e5d

Uchino, T., Bourdakos, K.N., Ashburn, P., de Groot, C.H., Kiziroglou, M.E. and Smith, D.C. (2005) Catalyst free low temperature direct growth of carbon nanotubes on SiGe islands and Ge quantum dots. 6th International Conference on the Science and Application of Nanotubes, NT05, Sweden. 26 Jun - 01 Jul 2005.

Record type: Conference or Workshop Item (Other)

Abstract

A metal catalyst free growth method of carbon nanotubes (CNTs) has been developed using chemical vapor deposition (CVD) of CNTs on carbon implanted SiGe islands on Si substrates. From SEM and Raman measurements, the fabricated CNTs are identified as single walled CNTs (SWNTs) with diameter ranging from 1.2 to 1.6 nm. Thick and curly oxide nanofibers were also obtained as a by-product of the growth process but could be dissolved using HF treatment. Essential parts of the substrate preparation after CVD SiGe growth and carbon implant are a chemical oxidization by hydrogen peroxide solution and a heat treatment at 1000 °C prior to CNT growth. We believe that these processes enhance surface decomposition and assist the formation of carbon clusters, which play a role in seeding CNT growth. Though further investigation is required to improve the density of the SWNTs, the growth technique would be a practical technique for growing metal-free CNTs for a variety of applications, while at the same time opening up the prospect of merging CNT devices into silicon VLSI technology. We will also present results that demonstrate the application of this CNT growth technique to germanium quantum dot substrates.

Full text not available from this repository.

More information

Published date: 2005
Additional Information: Event Dates: 26th June - 1st July
Venue - Dates: 6th International Conference on the Science and Application of Nanotubes, NT05, Sweden, 2005-06-26 - 2005-07-01
Keywords: carbon nanotubes
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 261177
URI: https://eprints.soton.ac.uk/id/eprint/261177
PURE UUID: c96dc8ff-a056-4356-a706-19422bbb3841
ORCID for C.H. de Groot: ORCID iD orcid.org/0000-0002-3850-7101

Catalogue record

Date deposited: 02 Sep 2005
Last modified: 06 Jun 2018 12:50

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