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Impedance based flow sensors

Impedance based flow sensors
Impedance based flow sensors
Microfluidic analysis devices, often referred to as Micro Total Analysis Systems or the Lab-on-a-Chip, are often based on the manipulation of small volumes of fluid. These devices require the design and fabrication of components for fluid handling, control and measurement, such as micropumps, micromixers and flow sensors. The fabrication of miniature versions of large scale components such as pressure sensors and flow rate meters has been demonstrated. However, complicated fabrication is prohibitive and devices which involve flow constriction can be prone to blocking if particle containing samples are used. This paper presents results of the design and fabrication of a microimpedance measurement cell, designed to measure the impedance of sub-nanolitre volumes of fluids. The measurement system was designed to measure the electrical impedance at several different frequencies, allowing identification and analysis of the material contained within the sample volume. Measurements of different fluids at different flow rates through a microchannel containing the measurement cell are presented. The use of this system as a solid state flow rate sensor is then discussed.
Impedance sensing, microfluidics, flow sensor
634-641
Green, Nicolas G
d9b47269-c426-41fd-a41d-5f4579faa581
Tao, Sun
0b928d49-1e78-449b-b2a7-08ccec84be2d
Holmes, David
eeff86f7-ab4b-4795-9a01-82ce1275e34f
Morgan, Hywel
de00d59f-a5a2-48c4-a99a-1d5dd7854174
Green, Nicolas G
d9b47269-c426-41fd-a41d-5f4579faa581
Tao, Sun
0b928d49-1e78-449b-b2a7-08ccec84be2d
Holmes, David
eeff86f7-ab4b-4795-9a01-82ce1275e34f
Morgan, Hywel
de00d59f-a5a2-48c4-a99a-1d5dd7854174

Green, Nicolas G, Tao, Sun, Holmes, David and Morgan, Hywel (2005) Impedance based flow sensors. Microtechnologies for the New Millennium 2005 SPIE. pp. 634-641 .

Record type: Conference or Workshop Item (Paper)

Abstract

Microfluidic analysis devices, often referred to as Micro Total Analysis Systems or the Lab-on-a-Chip, are often based on the manipulation of small volumes of fluid. These devices require the design and fabrication of components for fluid handling, control and measurement, such as micropumps, micromixers and flow sensors. The fabrication of miniature versions of large scale components such as pressure sensors and flow rate meters has been demonstrated. However, complicated fabrication is prohibitive and devices which involve flow constriction can be prone to blocking if particle containing samples are used. This paper presents results of the design and fabrication of a microimpedance measurement cell, designed to measure the impedance of sub-nanolitre volumes of fluids. The measurement system was designed to measure the electrical impedance at several different frequencies, allowing identification and analysis of the material contained within the sample volume. Measurements of different fluids at different flow rates through a microchannel containing the measurement cell are presented. The use of this system as a solid state flow rate sensor is then discussed.

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More information

Published date: 2005
Additional Information: Event Dates: 9-11th May 2005
Venue - Dates: Microtechnologies for the New Millennium 2005 SPIE, 2005-05-11
Keywords: Impedance sensing, microfluidics, flow sensor
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 261203
URI: https://eprints.soton.ac.uk/id/eprint/261203
PURE UUID: 6fd0bca4-9c2b-433e-818d-f21e3d6c057a
ORCID for Nicolas G Green: ORCID iD orcid.org/0000-0001-9230-4455
ORCID for Hywel Morgan: ORCID iD orcid.org/0000-0003-4850-5676

Catalogue record

Date deposited: 08 Sep 2005
Last modified: 20 Jul 2019 00:59

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Contributors

Author: Nicolas G Green ORCID iD
Author: Sun Tao
Author: David Holmes
Author: Hywel Morgan ORCID iD

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