Frood, A J M, Beeby, S P, Tudor, M J and White, N M
IMPROVED REGISTRATION TECHNIQUE FOR FABRICATING THICK-FILM PIEZOELECTRIC SENSORS
At Eurosensors XIX.
11 - 14 Sep 2005.
A fundamental limitation of screen printing is the achievable alignment accuracy and resolution. This paper presents details of a thick-resist process that improves both of these factors. The technique involves exposing/developing a thick resist to form the desired pattern and then filling the features with thick film material using a doctor blading process. Minimum feature sizes of <40um have been achieved with a film thickness of 100um. Registration accuracy is comparable to standard photolithographic processes.
Conference or Workshop Item
||Event Dates: 11th-14th September 2005
|Venue - Dates:
||Eurosensors XIX, 2005-09-11 - 2005-09-14
||PZT, Doctor Blading, Thick Photoresist
||05 Oct 2005
||17 Apr 2017 21:59
|Further Information:||Google Scholar|
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