Improved registration technique for fabricating thick-film piezoelectric sensors
Improved registration technique for fabricating thick-film piezoelectric sensors
A fundamental limitation of screen printing is the achievable alignment accuracy and resolution. This paper presents details of a thick-resist process that improves both of these factors. The technique involves exposing/developing a thick resist to form the desired pattern and then filling the features with thick film material using a doctor blading process. Minimum feature sizes of <40µm have been achieved with a film thickness of 100µm. Registration accuracy is comparable to standard photolithographic processes.
PZT, Doctor Blading, Thick Photoresist
Frood, A.J.M.
0720a152-cef6-44b6-9632-e131d1223b0f
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M.J.
46eea408-2246-4aa0-8b44-86169ed601ff
White, N.M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
2005
Frood, A.J.M.
0720a152-cef6-44b6-9632-e131d1223b0f
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M.J.
46eea408-2246-4aa0-8b44-86169ed601ff
White, N.M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Frood, A.J.M., Beeby, S.P., Tudor, M.J. and White, N.M.
(2005)
Improved registration technique for fabricating thick-film piezoelectric sensors.
Eurosensors XIX, Barcelona, Spain, Barcelona, Spain.
11 - 14 Sep 2005.
Record type:
Conference or Workshop Item
(Paper)
Abstract
A fundamental limitation of screen printing is the achievable alignment accuracy and resolution. This paper presents details of a thick-resist process that improves both of these factors. The technique involves exposing/developing a thick resist to form the desired pattern and then filling the features with thick film material using a doctor blading process. Minimum feature sizes of <40µm have been achieved with a film thickness of 100µm. Registration accuracy is comparable to standard photolithographic processes.
Text
Eurosensors19_paper.pdf
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More information
Published date: 2005
Additional Information:
Event Dates: 11th-14th September 2005
Venue - Dates:
Eurosensors XIX, Barcelona, Spain, Barcelona, Spain, 2005-09-11 - 2005-09-14
Keywords:
PZT, Doctor Blading, Thick Photoresist
Organisations:
EEE
Identifiers
Local EPrints ID: 261295
URI: http://eprints.soton.ac.uk/id/eprint/261295
PURE UUID: 82c7c91b-76b1-46c9-a394-b789065ca9f6
Catalogue record
Date deposited: 05 Oct 2005
Last modified: 15 Mar 2024 02:46
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