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IMPROVED REGISTRATION TECHNIQUE FOR FABRICATING THICK-FILM PIEZOELECTRIC SENSORS

Record type: Conference or Workshop Item (Paper)

A fundamental limitation of screen printing is the achievable alignment accuracy and resolution. This paper presents details of a thick-resist process that improves both of these factors. The technique involves exposing/developing a thick resist to form the desired pattern and then filling the features with thick film material using a doctor blading process. Minimum feature sizes of <40um have been achieved with a film thickness of 100um. Registration accuracy is comparable to standard photolithographic processes.

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Citation

Frood, A J M, Beeby, S P, Tudor, M J and White, N M (2005) IMPROVED REGISTRATION TECHNIQUE FOR FABRICATING THICK-FILM PIEZOELECTRIC SENSORS At Eurosensors XIX. 11 - 14 Sep 2005.

More information

Published date: 2005
Additional Information: Event Dates: 11th-14th September 2005
Venue - Dates: Eurosensors XIX, 2005-09-11 - 2005-09-14
Keywords: PZT, Doctor Blading, Thick Photoresist
Organisations: EEE

Identifiers

Local EPrints ID: 261295
URI: http://eprints.soton.ac.uk/id/eprint/261295
PURE UUID: 82c7c91b-76b1-46c9-a394-b789065ca9f6
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 05 Oct 2005
Last modified: 18 Jul 2017 09:03

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Contributors

Author: A J M Frood
Author: S P Beeby ORCID iD
Author: M J Tudor
Author: N M White ORCID iD

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