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A Multilayer Thick-film PZT Actuator for MEMs Applications

A Multilayer Thick-film PZT Actuator for MEMs Applications
A Multilayer Thick-film PZT Actuator for MEMs Applications
Harris, NR
237cfdbd-86e4-4025-869c-c85136f14dfd
Hill, M
13d08973-687e-423b-9a2c-392dd6848548
Torah, R
7147b47b-db01-4124-95dc-90d6a9842688
Townsend, R
23b8f68c-d775-41a9-90b1-108382b50650
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Ding, J
0270c8b4-4223-4ad7-bc27-947064c0d9b4
Harris, NR
237cfdbd-86e4-4025-869c-c85136f14dfd
Hill, M
13d08973-687e-423b-9a2c-392dd6848548
Torah, R
7147b47b-db01-4124-95dc-90d6a9842688
Townsend, R
23b8f68c-d775-41a9-90b1-108382b50650
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Ding, J
0270c8b4-4223-4ad7-bc27-947064c0d9b4

Harris, NR, Hill, M, Torah, R, Townsend, R, Beeby, SP, White, NM and Ding, J (2005) A Multilayer Thick-film PZT Actuator for MEMs Applications. Eurosensors XIX, Barcelona, Spain, Barcelona, Spain. 11 - 14 Sep 2005.

Record type: Conference or Workshop Item (Poster)
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Eurosensors_Barcelona_extended_as_submitted.pdf - Other
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More information

Published date: 2005
Additional Information: Event Dates: 11-14 September 2005
Venue - Dates: Eurosensors XIX, Barcelona, Spain, Barcelona, Spain, 2005-09-11 - 2005-09-14
Organisations: EEE

Identifiers

Local EPrints ID: 261302
URI: http://eprints.soton.ac.uk/id/eprint/261302
PURE UUID: f51df407-6b40-48e5-924f-b6669e87e9d3
ORCID for NR Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for R Torah: ORCID iD orcid.org/0000-0002-5598-2860
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 06 Oct 2005
Last modified: 15 Mar 2024 03:20

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Contributors

Author: NR Harris ORCID iD
Author: M Hill
Author: R Torah ORCID iD
Author: R Townsend
Author: SP Beeby ORCID iD
Author: NM White ORCID iD
Author: J Ding

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