A Multilayer Thick-film PZT Actuator for MEMs Applications


Harris, NR, Hill, M, Torah, R, Townsend, R, Beeby, SP, White, NM and Ding, J (2005) A Multilayer Thick-film PZT Actuator for MEMs Applications At Eurosensors XIX. 11 - 14 Sep 2005.

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Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: 11-14 September 2005
Venue - Dates: Eurosensors XIX, 2005-09-11 - 2005-09-14
Organisations: EEE
ePrint ID: 261302
Date :
Date Event
2005Published
Date Deposited: 06 Oct 2005
Last Modified: 17 Apr 2017 21:59
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/261302

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