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Microscope Laboratory for undergraduate courses in Integrated Circuit design and fabrication

Microscope Laboratory for undergraduate courses in Integrated Circuit design and fabrication
Microscope Laboratory for undergraduate courses in Integrated Circuit design and fabrication
As part of the undergraduate courses in electronics and computer engineering in the department of Electronics and Computer Science at the University of Southampton, a significant proportion of laboratory time is devoted to a complete integrated circuit (IC) design from concept to fabrication and testing. An integral part of this work is the microscopy laboratory devoted to this design exercise. In this paper we show how microscopes are integrated into the wafer testing phase of the exercise and how the equipment has been customized to provide an effective introduction to the practical use of optical microscopes in electronics.
Wilson, Peter R
8a65c092-c197-4f43-b8fc-e12977783cb3
Ross, Neil
035ecb5f-c3c1-4f13-87d9-3df8d26b4a56
Brown, Andrew D
5c19e523-65ec-499b-9e7c-91522017d7e0
Wilson, Peter R
8a65c092-c197-4f43-b8fc-e12977783cb3
Ross, Neil
035ecb5f-c3c1-4f13-87d9-3df8d26b4a56
Brown, Andrew D
5c19e523-65ec-499b-9e7c-91522017d7e0

Wilson, Peter R, Ross, Neil and Brown, Andrew D (2003) Microscope Laboratory for undergraduate courses in Integrated Circuit design and fabrication Proceedings of the Royal Microscopy Society, 38, (4)

Record type: Article

Abstract

As part of the undergraduate courses in electronics and computer engineering in the department of Electronics and Computer Science at the University of Southampton, a significant proportion of laboratory time is devoted to a complete integrated circuit (IC) design from concept to fabrication and testing. An integral part of this work is the microscopy laboratory devoted to this design exercise. In this paper we show how microscopes are integrated into the wafer testing phase of the exercise and how the equipment has been customized to provide an effective introduction to the practical use of optical microscopes in electronics.

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Published date: 2003
Organisations: EEE

Identifiers

Local EPrints ID: 261657
URI: http://eprints.soton.ac.uk/id/eprint/261657
PURE UUID: 30b92668-0b4d-44a3-b1e5-c5178bb61d12

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Date deposited: 13 Dec 2005
Last modified: 18 Jul 2017 09:00

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Contributors

Author: Peter R Wilson
Author: Neil Ross
Author: Andrew D Brown

University divisions

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