Zhang, W, Potts, A, Bagnall, D. M and Davidson, B. R (2006) High resolution electron beam lithography for the fabrication of high density dielectric metamaterials. Thin Solid Films.
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Published date: July 2006
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 262179
URI: http://eprints.soton.ac.uk/id/eprint/262179
ISSN: 0040-6090
PURE UUID: 1c69ddc1-8937-4216-8fba-69d5509154a8
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Date deposited: 27 Mar 2006
Last modified: 10 Dec 2021 21:25
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Contributors
Author:
W Zhang
Author:
A Potts
Author:
D. M Bagnall
Author:
B. R Davidson
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