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High resolution electron beam lithography for the fabrication of high density dielectric metamaterials

High resolution electron beam lithography for the fabrication of high density dielectric metamaterials
High resolution electron beam lithography for the fabrication of high density dielectric metamaterials
0040-6090
Zhang, W
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Potts, A
a3c70ecc-a6ad-4a82-b871-0303479b1020
Bagnall, D. M
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Davidson, B. R
b451f4a3-49b4-4830-97cb-79f600e919d2
Zhang, W
e7ac3aeb-ecaf-462b-80f4-91bae68ebf4f
Potts, A
a3c70ecc-a6ad-4a82-b871-0303479b1020
Bagnall, D. M
5d84abc8-77e5-43f7-97cb-e28533f25ef1
Davidson, B. R
b451f4a3-49b4-4830-97cb-79f600e919d2

Zhang, W, Potts, A, Bagnall, D. M and Davidson, B. R (2006) High resolution electron beam lithography for the fabrication of high density dielectric metamaterials. Thin Solid Films.

Record type: Article

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More information

Published date: July 2006
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 262179
URI: http://eprints.soton.ac.uk/id/eprint/262179
ISSN: 0040-6090
PURE UUID: 1c69ddc1-8937-4216-8fba-69d5509154a8

Catalogue record

Date deposited: 27 Mar 2006
Last modified: 10 Dec 2021 21:25

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Contributors

Author: W Zhang
Author: A Potts
Author: D. M Bagnall
Author: B. R Davidson

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