A three dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips


Gollasch, C O, Moktadir, Zak, Kraft, Michael, Bagnall, Darren, Trupke, M, Eriksson, S and Hinds, E A (2004) A three dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips At 15th MicroMechanics Europe Workshop, Belgium. 05 - 07 Sep 2004. , pp. 33-36.

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Description/Abstract

We present a micromachined three-dimensional electrostatic actuator optimized for aligning and tuning optical microcavities on atom chips. The actuation in the chip plane which is used for miror positioning has a working envelope of 17 m. The design incorporates a unique locking mechanism which allows the out-of-plane actuation used for cavity tuning to be carried out once the in-plane actuation is completed. A maximum translation of 7 m can be achieved in this direction.

Item Type: Conference or Workshop Item (Paper)
Additional Information: Event Dates: 5 - 7 September 2004
Venue - Dates: 15th MicroMechanics Europe Workshop, Belgium, 2004-09-05 - 2004-09-07
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 262404
Date :
Date Event
2004Published
Date Deposited: 26 Apr 2006
Last Modified: 17 Apr 2017 21:42
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/262404

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