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Fabrication of high temperature surface acoustic wave devices for sensor applications

Fabrication of high temperature surface acoustic wave devices for sensor applications
Fabrication of high temperature surface acoustic wave devices for sensor applications
Surface acoustic devices have been shown to be suitable not only for signal processing but also for sensor applications. In this paper high temperature surface acoustic wave devices based on gallium orthophosphate have been fabricated, using a lift-off technique and tested for high frequency applications at temperatures up to 600 ºC. The measured S-parameter (S11) has been used to study the mass loading effect of the platinum electrodes and turnover temperature of GaPO4 with a 5? cut. The analysis of these results shows that the mass loading effect can be used to predict the desired resonant frequency of the SAW devices. Also two different adhesion layers for Pt metallisation were studied. Our results show that Zirconium is a more suitable under layer than Titanium.
0924-4247
403-407
Hamidon, MN
90215504-67cd-430f-981e-a1636e53db78
Skarda, V
e4ed4002-4de8-42f8-9100-a6b0fe16948a
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Krispel, F
54347c0f-0693-4d53-a975-0a36ee7b0e16
Krempl, P
d105929e-2e6c-48f3-9ade-3f03e83bac25
Binhack, M
66f54fe5-fc3f-4e60-aba0-f91ddb6423cf
Buff, W
a4948767-68c9-4b49-b948-ba5f9079e827
Hamidon, MN
90215504-67cd-430f-981e-a1636e53db78
Skarda, V
e4ed4002-4de8-42f8-9100-a6b0fe16948a
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Krispel, F
54347c0f-0693-4d53-a975-0a36ee7b0e16
Krempl, P
d105929e-2e6c-48f3-9ade-3f03e83bac25
Binhack, M
66f54fe5-fc3f-4e60-aba0-f91ddb6423cf
Buff, W
a4948767-68c9-4b49-b948-ba5f9079e827

Hamidon, MN, Skarda, V, White, NM, Krispel, F, Krempl, P, Binhack, M and Buff, W (2005) Fabrication of high temperature surface acoustic wave devices for sensor applications. Sensors and Actuators A: Physical, 123-124, 403-407.

Record type: Article

Abstract

Surface acoustic devices have been shown to be suitable not only for signal processing but also for sensor applications. In this paper high temperature surface acoustic wave devices based on gallium orthophosphate have been fabricated, using a lift-off technique and tested for high frequency applications at temperatures up to 600 ºC. The measured S-parameter (S11) has been used to study the mass loading effect of the platinum electrodes and turnover temperature of GaPO4 with a 5? cut. The analysis of these results shows that the mass loading effect can be used to predict the desired resonant frequency of the SAW devices. Also two different adhesion layers for Pt metallisation were studied. Our results show that Zirconium is a more suitable under layer than Titanium.

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Published date: 2005
Organisations: EEE

Identifiers

Local EPrints ID: 262454
URI: http://eprints.soton.ac.uk/id/eprint/262454
ISSN: 0924-4247
PURE UUID: ad82833d-8158-4b3f-a6c4-b6989b6e9f43
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

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Date deposited: 02 May 2006
Last modified: 03 Dec 2019 02:05

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