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Fabrication of high temperature surface acoustic wave devices for sensor applications

Hamidon, MN, Skarda, V, White, NM, Krispel, F, Krempl, P, Binhack, M and Buff, W (2005) Fabrication of high temperature surface acoustic wave devices for sensor applications Sensors and Actuators A: Physical, 123-124, pp. 403-407.

Record type: Article


Surface acoustic devices have been shown to be suitable not only for signal processing but also for sensor applications. In this paper high temperature surface acoustic wave devices based on gallium orthophosphate have been fabricated, using a lift-off technique and tested for high frequency applications at temperatures up to 600 ºC. The measured S-parameter (S11) has been used to study the mass loading effect of the platinum electrodes and turnover temperature of GaPO4 with a 5? cut. The analysis of these results shows that the mass loading effect can be used to predict the desired resonant frequency of the SAW devices. Also two different adhesion layers for Pt metallisation were studied. Our results show that Zirconium is a more suitable under layer than Titanium.

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Published date: 2005
Organisations: EEE


Local EPrints ID: 262454
ISSN: 0924-4247
PURE UUID: ad82833d-8158-4b3f-a6c4-b6989b6e9f43
ORCID for NM White: ORCID iD

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Date deposited: 02 May 2006
Last modified: 18 Jul 2017 08:51

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Author: MN Hamidon
Author: V Skarda
Author: NM White ORCID iD
Author: F Krispel
Author: P Krempl
Author: M Binhack
Author: W Buff

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