Suppression of boron diffusion due to carbon during rapid thermal annealing of SiGe based device materials: some comments
Suppression of boron diffusion due to carbon during rapid thermal annealing of SiGe based device materials: some comments
1013-1016
Karunaratne, M.S.A.
b1163151-8361-4ae9-bda1-ee1a216d50d2
Bonar, J.M.
12d01a95-92f9-4aa1-bce0-c857451cbbfe
Ashburn, P.
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Willoughby, A.F.W.
5176a13b-d691-4447-85a6-fdc681118819
March 2006
Karunaratne, M.S.A.
b1163151-8361-4ae9-bda1-ee1a216d50d2
Bonar, J.M.
12d01a95-92f9-4aa1-bce0-c857451cbbfe
Ashburn, P.
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Willoughby, A.F.W.
5176a13b-d691-4447-85a6-fdc681118819
Karunaratne, M.S.A., Bonar, J.M., Ashburn, P. and Willoughby, A.F.W.
(2006)
Suppression of boron diffusion due to carbon during rapid thermal annealing of SiGe based device materials: some comments.
Journal of Materials Science, 41 (3), .
This record has no associated files available for download.
More information
Published date: March 2006
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 262476
URI: http://eprints.soton.ac.uk/id/eprint/262476
ISSN: 0022-2461
PURE UUID: fc4cb131-0e25-4b7f-ba79-1d33fc3eaf3e
Catalogue record
Date deposited: 03 May 2006
Last modified: 08 Jan 2022 17:40
Export record
Contributors
Author:
M.S.A. Karunaratne
Author:
J.M. Bonar
Author:
A.F.W. Willoughby
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics