The University of Southampton
University of Southampton Institutional Repository

Schottky diode back contacts for high frequency capacitance studies on semiconductors

Mallik, Kanad, Falster, R.J. and Wilshaw, P.R. (2004) Schottky diode back contacts for high frequency capacitance studies on semiconductors Solid-State Electronics, 48, pp. 231-238.

Record type: Article


A technique using large area Schottky diode back contacts has been developed to enable high frequency capacitance studies to be carried out on semiconductors without the need to fabricate high quality ohmic back contacts. This technique will find application for very high resistivity materials or for the characterization of novel semiconductors when a method of producing good ohmic contacts has not been established. In this method a back contact much larger in area than the front contact diode under test is used. It is then found that accurate capacitance-voltage measurements can be made of the ionized doping density and, provided the back contact has sufficient leakage, the built-in potential can also be measured. Such specimens may also be used for characterization using the deep level transient spectroscopy (DLTS) technique and this is demonstrated by obtaining DLTS spectra from very high resistivity silicon specimens containing oxygen precipitates and comparing these to similar spectra obtained from more highly doped material.

PDF sse48_231.pdf - Other
Restricted to Registered users only
Download (327kB)

More information

Published date: February 2004
Additional Information: PACS Nos. 73.30.+y, 84.37.+q, 85.30.De, 71.55.-i
Keywords: Schottky diode, back contact, capacitance-voltage, DLTS, high resistivity, silicon
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 262676
PURE UUID: 6d5dfd78-8de0-42e1-aaf8-f11c310d6083

Catalogue record

Date deposited: 06 Jun 2006
Last modified: 18 Jul 2017 08:49

Export record


Author: Kanad Mallik
Author: R.J. Falster
Author: P.R. Wilshaw

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.