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On the physical nature of the base current 1/f noise typical for SiGe HBTs and Si BJTs made by SEG/NSEG epitaxy

On the physical nature of the base current 1/f noise typical for SiGe HBTs and Si BJTs made by SEG/NSEG epitaxy
On the physical nature of the base current 1/f noise typical for SiGe HBTs and Si BJTs made by SEG/NSEG epitaxy
It is shown that the high base current and associated low-frequency noise typical for the SiGe HBTs prepared by the selective epitaxial growth of the collector and non-selective epitaxial growth of the base and emitter (SEG/NSEG technology), can be explained by the mechanical stress between the collector and the field oxide surrounding the collector in these devices. The reason is that such stress provokes the viscous flow of the surface oxide producing an ‘action-at-distance’ effect which results in the creation of additional fast and slow surface centers at the poly/single crystal emitter and passivating oxide interfaces respectively. The increase of fast center density increases the recombination base current component while the increase of the slow centers density increases the intensity of the 1/f noise source. As a result, any factor that promotes the reduction of the stress or the decrease of the intensity of the surface oxide viscous flow serves to decrease the base current and its 1/f noise. Thus we have found that we can mitigate the undesirable effects by the following solutions: increasing the temperature of the selective epitaxial growth of the collector TSEG, decreasing the temperature of the rapid thermal activation TRTA, implantation of the BF2 implant into the field oxide before the collector and base layers are being grown, replacement of the bulk substrate by SOI. It is shown that the maximal decrease of the base current IB and of the spectral density of the 1/f noise SIB are as high as factors of 30 and 8,000, respectively.
Lukyanchikova, N.
42c8ec0a-a85a-4a7e-97e4-7b39c5ed19d9
Garbar, N.
445f1a7e-e4a7-4628-83e0-dcca724b345d
Smolanka, A.
c82ee02a-a77b-4351-9baa-5f906ce822f5
Lokshin, M.
08d4d26a-aff2-4044-897b-90b6aff52781
Hall, S.
a11a8f8b-d6fb-47a7-82b1-1f76d2f170dc
Buiu, O.
a994b22e-018b-4355-abd5-0227724f2a1a
Mitrovic, I.
c8d9bffc-30a3-43e5-9313-901e5c31d1a0
El Mubarek, H.A.W.
08195505-5e00-40a6-bc9f-ebbf2a2fbf63
Ashburn, P.
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Lukyanchikova, N.
42c8ec0a-a85a-4a7e-97e4-7b39c5ed19d9
Garbar, N.
445f1a7e-e4a7-4628-83e0-dcca724b345d
Smolanka, A.
c82ee02a-a77b-4351-9baa-5f906ce822f5
Lokshin, M.
08d4d26a-aff2-4044-897b-90b6aff52781
Hall, S.
a11a8f8b-d6fb-47a7-82b1-1f76d2f170dc
Buiu, O.
a994b22e-018b-4355-abd5-0227724f2a1a
Mitrovic, I.
c8d9bffc-30a3-43e5-9313-901e5c31d1a0
El Mubarek, H.A.W.
08195505-5e00-40a6-bc9f-ebbf2a2fbf63
Ashburn, P.
68cef6b7-205b-47aa-9efb-f1f09f5c1038

Lukyanchikova, N., Garbar, N., Smolanka, A., Lokshin, M., Hall, S., Buiu, O., Mitrovic, I., El Mubarek, H.A.W. and Ashburn, P. (2006) On the physical nature of the base current 1/f noise typical for SiGe HBTs and Si BJTs made by SEG/NSEG epitaxy. E-MRS, European Materials Research Society, Nice, France. 28 May - 01 Jun 2006.

Record type: Conference or Workshop Item (Poster)

Abstract

It is shown that the high base current and associated low-frequency noise typical for the SiGe HBTs prepared by the selective epitaxial growth of the collector and non-selective epitaxial growth of the base and emitter (SEG/NSEG technology), can be explained by the mechanical stress between the collector and the field oxide surrounding the collector in these devices. The reason is that such stress provokes the viscous flow of the surface oxide producing an ‘action-at-distance’ effect which results in the creation of additional fast and slow surface centers at the poly/single crystal emitter and passivating oxide interfaces respectively. The increase of fast center density increases the recombination base current component while the increase of the slow centers density increases the intensity of the 1/f noise source. As a result, any factor that promotes the reduction of the stress or the decrease of the intensity of the surface oxide viscous flow serves to decrease the base current and its 1/f noise. Thus we have found that we can mitigate the undesirable effects by the following solutions: increasing the temperature of the selective epitaxial growth of the collector TSEG, decreasing the temperature of the rapid thermal activation TRTA, implantation of the BF2 implant into the field oxide before the collector and base layers are being grown, replacement of the bulk substrate by SOI. It is shown that the maximal decrease of the base current IB and of the spectral density of the 1/f noise SIB are as high as factors of 30 and 8,000, respectively.

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More information

Published date: 2006
Additional Information: Event Dates: 29th May - 2nd June
Venue - Dates: E-MRS, European Materials Research Society, Nice, France, 2006-05-28 - 2006-06-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 262710
URI: http://eprints.soton.ac.uk/id/eprint/262710
PURE UUID: 5ba2f875-8f9e-4ac3-a48e-1702e7007e9d

Catalogue record

Date deposited: 14 Jun 2006
Last modified: 10 Dec 2021 21:30

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Contributors

Author: N. Lukyanchikova
Author: N. Garbar
Author: A. Smolanka
Author: M. Lokshin
Author: S. Hall
Author: O. Buiu
Author: I. Mitrovic
Author: H.A.W. El Mubarek
Author: P. Ashburn

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