The University of Southampton
×
Filter your search:
University of Southampton Institutional Repository

A multilayer thick-film PZT actuator for MEMs applications

A multilayer thick-film PZT actuator for MEMs applications
A multilayer thick-film PZT actuator for MEMs applications
This paper describes a technique for replacing the conventional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been considerably lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices. An actuator using the multilayer screen printed technique was designed for use in an ultrasonic flow-through separator, and its successful use is reported.
0924-4247
311-316
Harris, N.R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
Torah, R.
d454c8fa-e13b-4baa-bb5f-ef00be2e8d3a
Townsend, R.
f684df45-51a1-4e43-9033-b74265e22e2a
Beeby, S.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Ding, J.
3c8f054d-a84e-4f16-9767-c76364a1b5a2
Harris, N.R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
Torah, R.
d454c8fa-e13b-4baa-bb5f-ef00be2e8d3a
Townsend, R.
f684df45-51a1-4e43-9033-b74265e22e2a
Beeby, S.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Ding, J.
3c8f054d-a84e-4f16-9767-c76364a1b5a2

Harris, N.R., Hill, M., Torah, R., Townsend, R., Beeby, S., White, Neil and Ding, J. (2006) A multilayer thick-film PZT actuator for MEMs applications. Sensors and Actuators A: Physical, 132 (1), 311-316. (doi:10.1016/j.sna.2006.06.006).

Record type: Article

Abstract

This paper describes a technique for replacing the conventional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been considerably lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices. An actuator using the multilayer screen printed technique was designed for use in an ultrasonic flow-through separator, and its successful use is reported.

Text
Latestpublished.pdf - Other
Download (737kB)

More information

Published date: November 2006
Organisations: Electronics & Computer Science, Mechatronics, EEE
Learn more about Electronics & Computer Science research

Identifiers

Local EPrints ID: 263152
URI: http://eprints.soton.ac.uk/id/eprint/263152
DOI: doi:10.1016/j.sna.2006.06.006
ISSN: 0924-4247
PURE UUID: 3461e60f-060c-41af-82e0-c12d1afb6fc4
ORCID for N.R. Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for M. Hill: ORCID iD orcid.org/0000-0001-6448-9448
ORCID for S. Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for Neil White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 06 Nov 2006
Last modified: 15 Mar 2024 02:46

Export record

Altmetrics

Contributors

Author: N.R. Harris ORCID iD
Author: M. Hill ORCID iD
Author: R. Torah
Author: R. Townsend
Author: S. Beeby ORCID iD
Author: Neil White ORCID iD
Author: J. Ding

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Library staff additional information
Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×