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A multilayer thick-film PZT actuator for MEMs applications

A multilayer thick-film PZT actuator for MEMs applications
A multilayer thick-film PZT actuator for MEMs applications
This paper describes a technique for replacing the conventional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been considerably lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices. An actuator using the multilayer screen printed technique was designed for use in an ultrasonic flow-through separator, and its successful use is reported.
0924-4247
311-316
Harris, N.R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
Torah, R.
d454c8fa-e13b-4baa-bb5f-ef00be2e8d3a
Townsend, R.
f684df45-51a1-4e43-9033-b74265e22e2a
Beeby, S.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Ding, J.
3c8f054d-a84e-4f16-9767-c76364a1b5a2
Harris, N.R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
Torah, R.
d454c8fa-e13b-4baa-bb5f-ef00be2e8d3a
Townsend, R.
f684df45-51a1-4e43-9033-b74265e22e2a
Beeby, S.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Ding, J.
3c8f054d-a84e-4f16-9767-c76364a1b5a2

Harris, N.R., Hill, M., Torah, R., Townsend, R., Beeby, S., White, Neil and Ding, J. (2006) A multilayer thick-film PZT actuator for MEMs applications Sensors and Actuators A: Physical, 132, (1), pp. 311-316. (doi:10.1016/j.sna.2006.06.006).

Record type: Article

Abstract

This paper describes a technique for replacing the conventional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been considerably lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices. An actuator using the multilayer screen printed technique was designed for use in an ultrasonic flow-through separator, and its successful use is reported.

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Published date: November 2006
Organisations: Electronics & Computer Science, Mechatronics, EEE

Identifiers

Local EPrints ID: 263152
URI: http://eprints.soton.ac.uk/id/eprint/263152
ISSN: 0924-4247
PURE UUID: 3461e60f-060c-41af-82e0-c12d1afb6fc4
ORCID for N.R. Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for M. Hill: ORCID iD orcid.org/0000-0001-6448-9448
ORCID for S. Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for Neil White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 06 Nov 2006
Last modified: 18 Jul 2017 08:43

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Contributors

Author: N.R. Harris ORCID iD
Author: M. Hill ORCID iD
Author: R. Torah
Author: R. Townsend
Author: S. Beeby ORCID iD
Author: Neil White ORCID iD
Author: J. Ding

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