The University of Southampton
University of Southampton Institutional Repository

A multilayer thick-film PZT actuator for MEMs applications

Harris, N.R., Hill, M., Torah, R., Townsend, R., Beeby, S., White, Neil and Ding, J. (2006) A multilayer thick-film PZT actuator for MEMs applications Sensors and Actuators A: Physical, 132, (1), pp. 311-316. (doi:10.1016/j.sna.2006.06.006).

Record type: Article


This paper describes a technique for replacing the conventional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been considerably lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices. An actuator using the multilayer screen printed technique was designed for use in an ultrasonic flow-through separator, and its successful use is reported.

PDF Latestpublished.pdf - Other
Download (737kB)

More information

Published date: November 2006
Organisations: Electronics & Computer Science, Mechatronics, EEE


Local EPrints ID: 263152
ISSN: 0924-4247
PURE UUID: 3461e60f-060c-41af-82e0-c12d1afb6fc4
ORCID for N.R. Harris: ORCID iD
ORCID for M. Hill: ORCID iD
ORCID for S. Beeby: ORCID iD
ORCID for Neil White: ORCID iD

Catalogue record

Date deposited: 06 Nov 2006
Last modified: 18 Jul 2017 08:43

Export record



Author: N.R. Harris ORCID iD
Author: M. Hill ORCID iD
Author: R. Torah
Author: R. Townsend
Author: S. Beeby ORCID iD
Author: Neil White ORCID iD
Author: J. Ding

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.