Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 µm long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.
MEMS, FABRICATION, CANTILEVER
35-44
Duval, Fabrice
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Wilson, Stephen
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Ensell, Graham
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Evanno, Nicolas
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Cain, Markys
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Whatmore, Roger
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January 2007
Duval, Fabrice
cb7a6ecf-d235-4e57-afac-8a93d5f059bb
Wilson, Stephen
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Ensell, Graham
dd522300-e6ad-4f1d-8172-b27dd007770f
Evanno, Nicolas
b1c5c220-9973-42f9-9014-6f2e4b7d4057
Cain, Markys
753d62e0-7174-4c38-bdd8-5dc687f3e048
Whatmore, Roger
4249edbd-0bd9-4ac7-8896-5cb27ce29f93
Duval, Fabrice, Wilson, Stephen, Ensell, Graham, Evanno, Nicolas, Cain, Markys and Whatmore, Roger
(2007)
Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor.
Sensors and Actuators A: Physical, 133 (1), .
(doi:10.1016/j.sna.2006.03.035).
Abstract
This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 µm long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.
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Published date: January 2007
Keywords:
MEMS, FABRICATION, CANTILEVER
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 263266
URI: http://eprints.soton.ac.uk/id/eprint/263266
ISSN: 0924-4247
PURE UUID: 1ab8175b-d3c2-4a73-b508-68aee0248549
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Date deposited: 23 Feb 2007
Last modified: 14 Mar 2024 07:28
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Author:
Fabrice Duval
Author:
Stephen Wilson
Author:
Graham Ensell
Author:
Nicolas Evanno
Author:
Markys Cain
Author:
Roger Whatmore
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