Micromachined vibratory gyroscopes controlled by a high order band-pass sigma delta modulator.

Abstract

Abstract—This work reports on the design of novel closed-loop control systems for the sense mode of a vibratory-rate gyroscope based on a high-order sigma-delta modulator (SDM). A low-pass and two distinctive bandpass topologies are derived, and their advantages discussed. So far, most closed-loop force-feedback control systems for these sensors were based on low-pass SDM’s. Usually, the sensing element of a vibratory gyroscope is designed with a high quality factor to increase the sensitivity and, hence, can be treated as a mechanical resonator. Furthermore, the output characteristic of vibratory rate gyroscopes is narrowband amplitude- modulated signal. Therefore, a bandpass M is a more appropriate control strategy for a vibratory gyroscope than a low-pass SDM. Using a high-order bandpass SDM, the control system can adopt a much lower sampling frequency compared with a low-pass SDM while achieving a similar noise floor for a given oversampling ratio (OSR). In addition, a control system based on a high-order bandpass SDM is superior as it not only greatly shapes the quantization noise, but also alleviates tonal behavior, as is often seen in low-order SDM control systems, and has good immunities to fabrication tolerances and parameter mismatch. These properties are investigated in this study at system level.

More information

Identifiers

Catalogue record

Export record