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Micromachined vibratory gyroscopes controlled by a high order band-pass sigma delta modulator.

Dong, Yufeng, Kraft, Michael and Redman-White, William (2007) Micromachined vibratory gyroscopes controlled by a high order band-pass sigma delta modulator. IEEE Sensors Journal, 7, (1), pp. 59-69.

Record type: Article


Abstract—This work reports on the design of novel closed-loop control systems for the sense mode of a vibratory-rate gyroscope based on a high-order sigma-delta modulator (SDM). A low-pass and two distinctive bandpass topologies are derived, and their advantages discussed. So far, most closed-loop force-feedback control systems for these sensors were based on low-pass SDM’s. Usually, the sensing element of a vibratory gyroscope is designed with a high quality factor to increase the sensitivity and, hence, can be treated as a mechanical resonator. Furthermore, the output characteristic of vibratory rate gyroscopes is narrowband amplitude- modulated signal. Therefore, a bandpass M is a more appropriate control strategy for a vibratory gyroscope than a low-pass SDM. Using a high-order bandpass SDM, the control system can adopt a much lower sampling frequency compared with a low-pass SDM while achieving a similar noise floor for a given oversampling ratio (OSR). In addition, a control system based on a high-order bandpass SDM is superior as it not only greatly shapes the quantization noise, but also alleviates tonal behavior, as is often seen in low-order SDM control systems, and has good immunities to fabrication tolerances and parameter mismatch. These properties are investigated in this study at system level.

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Published date: January 2007
Keywords: MEMS gyroscopes
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 263446
ISSN: 1530-437X
PURE UUID: 22b87e9c-a41f-4597-b71f-35f762135d84

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Date deposited: 15 Feb 2007
Last modified: 18 Jul 2017 07:45

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Author: Yufeng Dong
Author: Michael Kraft
Author: William Redman-White

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