Force feedback linearization for higher-order electromechanical sigma-delta modulators.
Force feedback linearization for higher-order electromechanical sigma-delta modulators.
Abstract A higher-order electromechanical sigma–delta modulator can greatly improve the signal-to-noise ratio compared with a second-order loop that only uses the sensing element as a loop filter. However, the electrostatic force feedback on the proof mass is inherently nonlinear, which will produce harmonics in the output spectrum and limits the total signal-to-noise and distortion ratio. High performance inertial sensors, which use sigma–delta modulators as a closed-loop control system, have strict requirements on the output signal distortion. In this paper, nonlinear effects from the force feedback and pick-off circuits are analysed and a strategy for force feedback linearization is put forward which can considerably improve the signal-to-noise and distortion ratio. A PCB prototype of a fifth-order electromechanical modulator with a bulk micromachined accelerometer was used to demonstrate the concept.
54-60
Dong, Yufeng
08820198-3144-4e9e-9ae8-3a81d801f3c5
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Redman-White, William
d5376167-c925-460f-8e9c-13bffda8e0bf
2006
Dong, Yufeng
08820198-3144-4e9e-9ae8-3a81d801f3c5
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Redman-White, William
d5376167-c925-460f-8e9c-13bffda8e0bf
Dong, Yufeng, Kraft, Michael and Redman-White, William
(2006)
Force feedback linearization for higher-order electromechanical sigma-delta modulators.
Journal of Micromechanics and Microengineering, 16, .
Abstract
Abstract A higher-order electromechanical sigma–delta modulator can greatly improve the signal-to-noise ratio compared with a second-order loop that only uses the sensing element as a loop filter. However, the electrostatic force feedback on the proof mass is inherently nonlinear, which will produce harmonics in the output spectrum and limits the total signal-to-noise and distortion ratio. High performance inertial sensors, which use sigma–delta modulators as a closed-loop control system, have strict requirements on the output signal distortion. In this paper, nonlinear effects from the force feedback and pick-off circuits are analysed and a strategy for force feedback linearization is put forward which can considerably improve the signal-to-noise and distortion ratio. A PCB prototype of a fifth-order electromechanical modulator with a bulk micromachined accelerometer was used to demonstrate the concept.
Text
JMM_feedback_linear_2006.pdf
- Other
More information
Published date: 2006
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 263447
URI: http://eprints.soton.ac.uk/id/eprint/263447
ISSN: 0960-1317
PURE UUID: af14f5cd-55c6-4a2c-b1d6-68a72c2eb00f
Catalogue record
Date deposited: 15 Feb 2007
Last modified: 14 Mar 2024 07:32
Export record
Contributors
Author:
Yufeng Dong
Author:
Michael Kraft
Author:
William Redman-White
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics