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Force feedback linearization for higher-order electromechanical sigma-delta modulators.

Force feedback linearization for higher-order electromechanical sigma-delta modulators.
Force feedback linearization for higher-order electromechanical sigma-delta modulators.
Abstract A higher-order electromechanical sigma–delta modulator can greatly improve the signal-to-noise ratio compared with a second-order loop that only uses the sensing element as a loop filter. However, the electrostatic force feedback on the proof mass is inherently nonlinear, which will produce harmonics in the output spectrum and limits the total signal-to-noise and distortion ratio. High performance inertial sensors, which use sigma–delta modulators as a closed-loop control system, have strict requirements on the output signal distortion. In this paper, nonlinear effects from the force feedback and pick-off circuits are analysed and a strategy for force feedback linearization is put forward which can considerably improve the signal-to-noise and distortion ratio. A PCB prototype of a fifth-order electromechanical modulator with a bulk micromachined accelerometer was used to demonstrate the concept.
0960-1317
54-60
Dong, Yufeng
08820198-3144-4e9e-9ae8-3a81d801f3c5
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Redman-White, William
d5376167-c925-460f-8e9c-13bffda8e0bf
Dong, Yufeng
08820198-3144-4e9e-9ae8-3a81d801f3c5
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Redman-White, William
d5376167-c925-460f-8e9c-13bffda8e0bf

Dong, Yufeng, Kraft, Michael and Redman-White, William (2006) Force feedback linearization for higher-order electromechanical sigma-delta modulators. Journal of Micromechanics and Microengineering, 16, 54-60.

Record type: Article

Abstract

Abstract A higher-order electromechanical sigma–delta modulator can greatly improve the signal-to-noise ratio compared with a second-order loop that only uses the sensing element as a loop filter. However, the electrostatic force feedback on the proof mass is inherently nonlinear, which will produce harmonics in the output spectrum and limits the total signal-to-noise and distortion ratio. High performance inertial sensors, which use sigma–delta modulators as a closed-loop control system, have strict requirements on the output signal distortion. In this paper, nonlinear effects from the force feedback and pick-off circuits are analysed and a strategy for force feedback linearization is put forward which can considerably improve the signal-to-noise and distortion ratio. A PCB prototype of a fifth-order electromechanical modulator with a bulk micromachined accelerometer was used to demonstrate the concept.

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Published date: 2006
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 263447
URI: https://eprints.soton.ac.uk/id/eprint/263447
ISSN: 0960-1317
PURE UUID: af14f5cd-55c6-4a2c-b1d6-68a72c2eb00f

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Date deposited: 15 Feb 2007
Last modified: 19 Jul 2019 22:29

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