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Pyramidal micromirrors for microsystems and atom chips

Pyramidal micromirrors for microsystems and atom chips
Pyramidal micromirrors for microsystems and atom chips
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micromirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into micro-optoelectromechanical systems and atom chips. We have shown that structures of this shape can be used to laser-cool and hold atoms in a magneto-optical trap.
0003-6951
071116-[3pp]
Trupke, M.
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Ramirez-Martinez, F.
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Curtis, E.
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Ashmore, J.P.
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Erikkson, S.
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Hinds, E.
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Moktadir, Z.
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Gollasch, C.
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Kraft, M.
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Vijaya Prakash, G.
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Baumberg, J.J.
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Trupke, M.
f98530de-3dcc-4b7a-ace2-ce963ddf6430
Ramirez-Martinez, F.
a1a96061-2c8b-4876-a629-8684d3115df5
Curtis, E.
eb81880b-e50a-4705-b12b-7a6b38dd7a81
Ashmore, J.P.
78bc6255-82cd-4a7b-83d1-86055e2ece19
Erikkson, S.
f08662fb-2ab0-4445-81e0-913dd3c98531
Hinds, E.
57b0d145-46be-4104-be9c-115cace29d89
Moktadir, Z.
d602f778-3c48-4654-aa20-d55c2e55c4b8
Gollasch, C.
173e5b3a-c15c-49e3-a5bc-f2e1a4100bcd
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Vijaya Prakash, G.
658d7c66-7665-4fb8-a34e-04de8362a998
Baumberg, J.J.
78e1ea7e-8c70-404c-bf84-59aafe75cd07

Trupke, M., Ramirez-Martinez, F., Curtis, E., Ashmore, J.P., Erikkson, S., Hinds, E., Moktadir, Z., Gollasch, C., Kraft, M., Vijaya Prakash, G. and Baumberg, J.J. (2006) Pyramidal micromirrors for microsystems and atom chips. Applied Physics Letters, 88 (71116), 071116-[3pp]. (doi:10.1063/1.2172412).

Record type: Article

Abstract

Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micromirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into micro-optoelectromechanical systems and atom chips. We have shown that structures of this shape can be used to laser-cool and hold atoms in a magneto-optical trap.

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More information

Published date: 2006
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 263450
URI: http://eprints.soton.ac.uk/id/eprint/263450
ISSN: 0003-6951
PURE UUID: 73139a82-e081-49c2-b2c5-a3f920ae359a

Catalogue record

Date deposited: 15 Feb 2007
Last modified: 16 Dec 2019 20:43

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