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Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications

Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications
Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications
This paper presents a silicon microgenerator, fabricated using standard silicon micromachining techniques, which converts external ambient vibrations into electrical energy. Power is generated by an electromagnetic transduction mechanism with static magnets positioned on either side of a moving coil, which is located on a silicon structure designed to resonate laterally in the plane of the chip. The volume of this device is approximately 100 mm3. ANSYS finite element analysis (FEA) has been used to determine the optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 3D software have been performed to determine the voltage generated from a single beam generator design. The predicted voltage levels of 0.7–4.15 V can be generated for a two-pole arrangement by tuning the damping factor to achieve maximum displacement for a given input excitation. Experimental results from the microgenerator demonstrate a maximum power output of 104 nW for 0.4g (g=9.81 m s1) input acceleration at 1.615 kHz. Other frequencies can be achieved by employing different geometries or materials
0946-7076
1071-1077
Koukarenko, E
b34ae878-2776-4088-8880-5b2bd4f33ec3
Beeby, S
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M
46eea408-2246-4aa0-8b44-86169ed601ff
White, N
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
O’Donnell, T
5c5356eb-a7b7-4903-a102-42dca2f63451
Saha, T
c676ca0f-e657-4d7b-bc4d-2adcb568dd60
Kulkani, S
a27271af-b57a-4a5f-a230-f08785f72015
Roy, S
e666eef6-02d8-4e39-bd06-2402d3cf77ec
Koukarenko, E
b34ae878-2776-4088-8880-5b2bd4f33ec3
Beeby, S
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M
46eea408-2246-4aa0-8b44-86169ed601ff
White, N
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
O’Donnell, T
5c5356eb-a7b7-4903-a102-42dca2f63451
Saha, T
c676ca0f-e657-4d7b-bc4d-2adcb568dd60
Kulkani, S
a27271af-b57a-4a5f-a230-f08785f72015
Roy, S
e666eef6-02d8-4e39-bd06-2402d3cf77ec

Koukarenko, E, Beeby, S, Tudor, M, White, N, O’Donnell, T, Saha, T, Kulkani, S and Roy, S (2006) Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications. Microsystem Technologies, 12 (11), 1071-1077.

Record type: Article

Abstract

This paper presents a silicon microgenerator, fabricated using standard silicon micromachining techniques, which converts external ambient vibrations into electrical energy. Power is generated by an electromagnetic transduction mechanism with static magnets positioned on either side of a moving coil, which is located on a silicon structure designed to resonate laterally in the plane of the chip. The volume of this device is approximately 100 mm3. ANSYS finite element analysis (FEA) has been used to determine the optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 3D software have been performed to determine the voltage generated from a single beam generator design. The predicted voltage levels of 0.7–4.15 V can be generated for a two-pole arrangement by tuning the damping factor to achieve maximum displacement for a given input excitation. Experimental results from the microgenerator demonstrate a maximum power output of 104 nW for 0.4g (g=9.81 m s1) input acceleration at 1.615 kHz. Other frequencies can be achieved by employing different geometries or materials

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Published date: September 2006
Organisations: EEE

Identifiers

Local EPrints ID: 263652
URI: https://eprints.soton.ac.uk/id/eprint/263652
ISSN: 0946-7076
PURE UUID: e151f099-8e87-4c54-9255-bae976f6ae3d
ORCID for S Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 05 Mar 2007
Last modified: 06 Jun 2018 13:12

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