The University of Southampton
University of Southampton Institutional Repository

Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications

Koukarenko, E, Beeby, S, Tudor, M, White, N, O’Donnell, T, Saha, T, Kulkani, S and Roy, S (2006) Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications Microsystem Technologies, 12, (11), pp. 1071-1077.

Record type: Article


This paper presents a silicon microgenerator, fabricated using standard silicon micromachining techniques, which converts external ambient vibrations into electrical energy. Power is generated by an electromagnetic transduction mechanism with static magnets positioned on either side of a moving coil, which is located on a silicon structure designed to resonate laterally in the plane of the chip. The volume of this device is approximately 100 mm3. ANSYS finite element analysis (FEA) has been used to determine the optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 3D software have been performed to determine the voltage generated from a single beam generator design. The predicted voltage levels of 0.7–4.15 V can be generated for a two-pole arrangement by tuning the damping factor to achieve maximum displacement for a given input excitation. Experimental results from the microgenerator demonstrate a maximum power output of 104 nW for 0.4g (g=9.81 m s1) input acceleration at 1.615 kHz. Other frequencies can be achieved by employing different geometries or materials

PDF MEMS.pdf - Other
Download (495kB)

More information

Published date: September 2006
Organisations: EEE


Local EPrints ID: 263652
ISSN: 0946-7076
PURE UUID: e151f099-8e87-4c54-9255-bae976f6ae3d
ORCID for S Beeby: ORCID iD
ORCID for N White: ORCID iD

Catalogue record

Date deposited: 05 Mar 2007
Last modified: 18 Jul 2017 07:43

Export record


Author: E Koukarenko
Author: S Beeby ORCID iD
Author: M Tudor
Author: N White ORCID iD
Author: T O’Donnell
Author: T Saha
Author: S Kulkani
Author: S Roy

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.