Vibration Based Electromagnetic MicroPower Generator on Si
Vibration Based Electromagnetic MicroPower Generator on Si
This paper discusses the theory, design and simulation of electromagnetic micropower generators with electroplated micromagnets. The power generators are fabricated using standard microelectromechanical system processing techniques. Electromagnetic two-dimensional finite element anlysis simulations are used to determine voltage and power that can be generated from different designs. This paper reports a maximum voltage and power of 55 mV and 70 W for the first design, incorporating microfabricated two-layer Cu coils on a Si paddle vibrating between two sets of oppositely polarized electroplated Co50Pt50 face centered tetragonal phase hard magnets. A peak voltage and power of 950 mV and 85 W are obtained for the second design, which includes electroplated Ni45Fe55 as a soft magnetic layer underneath the hard magnets. The volume of the device is about 30 mm3.
1-7
Kulkarni, S.
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Roy, S.
ac99cb46-0b15-486d-bd52-8a0523d7dc39
O’Donnell, T
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Beeby, S
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Tudor, M
46eea408-2246-4aa0-8b44-86169ed601ff
April 2006
Kulkarni, S.
3fedd5b6-a5c6-45b3-bf79-6b950d0d82a1
Roy, S.
ac99cb46-0b15-486d-bd52-8a0523d7dc39
O’Donnell, T
5c5356eb-a7b7-4903-a102-42dca2f63451
Beeby, S
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M
46eea408-2246-4aa0-8b44-86169ed601ff
Kulkarni, S., Roy, S., O’Donnell, T, Beeby, S and Tudor, M
(2006)
Vibration Based Electromagnetic MicroPower Generator on Si.
Journal of Applied Physics, 99 (8), .
(doi:10.1063/1.2176089).
Abstract
This paper discusses the theory, design and simulation of electromagnetic micropower generators with electroplated micromagnets. The power generators are fabricated using standard microelectromechanical system processing techniques. Electromagnetic two-dimensional finite element anlysis simulations are used to determine voltage and power that can be generated from different designs. This paper reports a maximum voltage and power of 55 mV and 70 W for the first design, incorporating microfabricated two-layer Cu coils on a Si paddle vibrating between two sets of oppositely polarized electroplated Co50Pt50 face centered tetragonal phase hard magnets. A peak voltage and power of 950 mV and 85 W are obtained for the second design, which includes electroplated Ni45Fe55 as a soft magnetic layer underneath the hard magnets. The volume of the device is about 30 mm3.
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Published date: April 2006
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EEE
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Local EPrints ID: 263654
URI: http://eprints.soton.ac.uk/id/eprint/263654
ISSN: 0021-8979
PURE UUID: 0e75b677-0beb-4f5c-b3f0-e26e9ac71c71
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Date deposited: 05 Mar 2007
Last modified: 15 Mar 2024 02:46
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Author:
S. Kulkarni
Author:
S. Roy
Author:
T O’Donnell
Author:
S Beeby
Author:
M Tudor
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