Unstable etching of Si(110) with potassium hydroxide
Unstable etching of Si(110) with potassium hydroxide
We present experimental data for the morphological evolution of Si(110) etched with potassium hydroxide. The observed results are interpreted using a continuum equation. The results reveal the presence of unstable etching which leads to the formation of a columnar structure on the surface. The early stage of the formation of this columnar structure can be explained by a linear theory. This instability is caused by anisotropic surface tension.
33309
Moktadir, Z
9e14f4f9-7314-4a39-9776-473806c75dd4
Sato, K
14fbcaeb-f9db-4bb6-b046-fa5e04e4b219
2001
Moktadir, Z
9e14f4f9-7314-4a39-9776-473806c75dd4
Sato, K
14fbcaeb-f9db-4bb6-b046-fa5e04e4b219
Moktadir, Z and Sato, K
(2001)
Unstable etching of Si(110) with potassium hydroxide.
Physical Review B, 64, .
Abstract
We present experimental data for the morphological evolution of Si(110) etched with potassium hydroxide. The observed results are interpreted using a continuum equation. The results reveal the presence of unstable etching which leads to the formation of a columnar structure on the surface. The early stage of the formation of this columnar structure can be explained by a linear theory. This instability is caused by anisotropic surface tension.
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Published date: 2001
Organisations:
Nanoelectronics and Nanotechnology
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Local EPrints ID: 263746
URI: http://eprints.soton.ac.uk/id/eprint/263746
PURE UUID: 39bb3a75-fd7a-4d10-af14-2c1df31038dc
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Date deposited: 26 Mar 2007
Last modified: 08 Jan 2022 02:45
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Author:
Z Moktadir
Author:
K Sato
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