The University of Southampton
University of Southampton Institutional Repository

Unstable etching of Si(110) with potassium hydroxide

Moktadir, Z and Sato, K (2001) Unstable etching of Si(110) with potassium hydroxide Phys. Rev. B, 64, p. 33309.

Record type: Article

Abstract

We present experimental data for the morphological evolution of Si(110) etched with potassium hydroxide. The observed results are interpreted using a continuum equation. The results reveal the presence of unstable etching which leads to the formation of a columnar structure on the surface. The early stage of the formation of this columnar structure can be explained by a linear theory. This instability is caused by anisotropic surface tension.

Full text not available from this repository.

More information

Published date: 2001
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 263746
URI: http://eprints.soton.ac.uk/id/eprint/263746
PURE UUID: 39bb3a75-fd7a-4d10-af14-2c1df31038dc

Catalogue record

Date deposited: 26 Mar 2007
Last modified: 18 Jul 2017 07:42

Export record

Contributors

Author: Z Moktadir
Author: K Sato

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×