Torah, R, Beeby, S, Tudor, M and White, N (2007) Thick-film Piezoceramics and Devices. Journal of Electroceramics. (doi:10.1007/s10832-007-9040-7).
Abstract
Over the past 20 years, thick-film (screen printed) technology has been shown to possess a variety of desirable characteristics, which are particularly suitable for the realisation of micro-sensors and actuators. In particular, thick-film sensors are noted for their robust, versatile, compact and inexpensive nature. This paper will describe how screen printed thick-films can be used as the basis for a variety of piezoelectric a transducers. It will be shown how the technology can be combined with MicroElectroMechanical Systems (MEMS) to generate new types of microengineered structure. The evolution of the technology to a successful enabling mechanism for modern-day solid state sensors is described. The paper begins with a brief overview of piezoelectric thick-films including a discussion of the main factors relating to paste formulation, characterisation and techniques for fabricating devices. There is also a description of methods for fabricating thick-films on silicon, which opens up the possibility of using thick-film technology in the field of MEMS. A number of specific sensors and actuators are described, including accelerometers, micropumps, ultrasonic motors, slip sensors for prosthetic hands, resonators, elastic wave sensors and ultrasonic separators.
This record has no associated files available for download.
More information
Identifiers
Catalogue record
Export record
Altmetrics
Contributors
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.