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Thick-film Piezoceramics and Devices

Thick-film Piezoceramics and Devices
Thick-film Piezoceramics and Devices
Over the past 20 years, thick-film (screen printed) technology has been shown to possess a variety of desirable characteristics, which are particularly suitable for the realisation of micro-sensors and actuators. In particular, thick-film sensors are noted for their robust, versatile, compact and inexpensive nature. This paper will describe how screen printed thick-films can be used as the basis for a variety of piezoelectric a transducers. It will be shown how the technology can be combined with MicroElectroMechanical Systems (MEMS) to generate new types of microengineered structure. The evolution of the technology to a successful enabling mechanism for modern-day solid state sensors is described. The paper begins with a brief overview of piezoelectric thick-films including a discussion of the main factors relating to paste formulation, characterisation and techniques for fabricating devices. There is also a description of methods for fabricating thick-films on silicon, which opens up the possibility of using thick-film technology in the field of MEMS. A number of specific sensors and actuators are described, including accelerometers, micropumps, ultrasonic motors, slip sensors for prosthetic hands, resonators, elastic wave sensors and ultrasonic separators.
Torah, R
7147b47b-db01-4124-95dc-90d6a9842688
Beeby, S
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M
46eea408-2246-4aa0-8b44-86169ed601ff
White, N
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Torah, R
7147b47b-db01-4124-95dc-90d6a9842688
Beeby, S
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M
46eea408-2246-4aa0-8b44-86169ed601ff
White, N
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Torah, R, Beeby, S, Tudor, M and White, N (2007) Thick-film Piezoceramics and Devices J Electroceramics

Record type: Article

Abstract

Over the past 20 years, thick-film (screen printed) technology has been shown to possess a variety of desirable characteristics, which are particularly suitable for the realisation of micro-sensors and actuators. In particular, thick-film sensors are noted for their robust, versatile, compact and inexpensive nature. This paper will describe how screen printed thick-films can be used as the basis for a variety of piezoelectric a transducers. It will be shown how the technology can be combined with MicroElectroMechanical Systems (MEMS) to generate new types of microengineered structure. The evolution of the technology to a successful enabling mechanism for modern-day solid state sensors is described. The paper begins with a brief overview of piezoelectric thick-films including a discussion of the main factors relating to paste formulation, characterisation and techniques for fabricating devices. There is also a description of methods for fabricating thick-films on silicon, which opens up the possibility of using thick-film technology in the field of MEMS. A number of specific sensors and actuators are described, including accelerometers, micropumps, ultrasonic motors, slip sensors for prosthetic hands, resonators, elastic wave sensors and ultrasonic separators.

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More information

Published date: 2007
Organisations: EEE

Identifiers

Local EPrints ID: 263758
URI: http://eprints.soton.ac.uk/id/eprint/263758
PURE UUID: 85022d78-3564-4af1-a1a7-94f1b3de2d2e
ORCID for S Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 27 Mar 2007
Last modified: 12 Nov 2017 06:49

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Contributors

Author: R Torah
Author: S Beeby ORCID iD
Author: M Tudor
Author: N White ORCID iD

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