The University of Southampton
University of Southampton Institutional Repository

Thick-film Piezoceramics and Devices

Torah, R, Beeby, S, Tudor, M and White, N (2007) Thick-film Piezoceramics and Devices J Electroceramics (doi:10.1007/s10832-007-9040-7).

Record type: Article


Over the past 20 years, thick-film (screen printed) technology has been shown to possess a variety of desirable characteristics, which are particularly suitable for the realisation of micro-sensors and actuators. In particular, thick-film sensors are noted for their robust, versatile, compact and inexpensive nature. This paper will describe how screen printed thick-films can be used as the basis for a variety of piezoelectric a transducers. It will be shown how the technology can be combined with MicroElectroMechanical Systems (MEMS) to generate new types of microengineered structure. The evolution of the technology to a successful enabling mechanism for modern-day solid state sensors is described. The paper begins with a brief overview of piezoelectric thick-films including a discussion of the main factors relating to paste formulation, characterisation and techniques for fabricating devices. There is also a description of methods for fabricating thick-films on silicon, which opens up the possibility of using thick-film technology in the field of MEMS. A number of specific sensors and actuators are described, including accelerometers, micropumps, ultrasonic motors, slip sensors for prosthetic hands, resonators, elastic wave sensors and ultrasonic separators.

Full text not available from this repository.

More information

Published date: 2007
Organisations: EEE


Local EPrints ID: 263758
PURE UUID: 85022d78-3564-4af1-a1a7-94f1b3de2d2e
ORCID for S Beeby: ORCID iD
ORCID for N White: ORCID iD

Catalogue record

Date deposited: 27 Mar 2007
Last modified: 18 Jul 2017 07:42

Export record



Author: R Torah
Author: S Beeby ORCID iD
Author: M Tudor
Author: N White ORCID iD

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.