Moktadir, Z, Sato, K, Shimizu, T and Shikida, M
Unstable Etching Of Si(110) With Potassium Hydroxide
At Materials Research Society, United States.
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We present the experimental data for the morphological evolution of Si(110) etched with Potassium Hydroxide. The observed results are interpreted using a continuum equation. The results reveal the presence of unstable etching, which leads to the formation of a columnar structure on the surface. The early stage of the formation of this columnar structure can be explained by a linear theory. This instability is caused by anisotropic surface tension.
Conference or Workshop Item
||Event Dates: December 2000
|Venue - Dates:
||Materials Research Society, United States, 2000-12-01
||Nanoelectronics and Nanotechnology
||04 Apr 2007
||17 Apr 2017 19:47
|Further Information:||Google Scholar|
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