A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices

Li, M., Kim, D.H., Lowther, D.A. and Sykulski, J.K. (2007) A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices. 16th Conference on the Computation of Electromagnetic Fields COMPUMAG, Aachen, Germany. 25 - 28 Jun 2007. pp. 315-316 .

Record type: Conference or Workshop Item (Paper)

Abstract

This paper presents a novel method for the computation of force in an electrostatically operated MEMS device. The approach is based on Continuum Design Senstivity Analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell Stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micro-mirror.

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Published date: 2007

Additional Information: Event Dates: 25 – 28 June 2007

Venue - Dates: 16th Conference on the Computation of Electromagnetic Fields COMPUMAG, Aachen, Germany, 2007-06-25 - 2007-06-28

Organisations: EEE

Identifiers

Local EPrints ID: 264366

URI: http://eprints.soton.ac.uk/id/eprint/264366

PURE UUID: c7aea13a-bf4c-4f6e-8ead-5c1f8a44cf52

ORCID for J.K. Sykulski:

orcid.org/0000-0001-6392-126X

Catalogue record

Date deposited: 02 Aug 2007

Last modified: 15 Mar 2024 02:34

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Contributors

Author: M. Li

Author: D.H. Kim

Author: D.A. Lowther

Author: J.K. Sykulski

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