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A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices

A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices
A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices
This paper presents a novel method for the computation of force in an electrostatically operated MEMS device. The approach is based on Continuum Design Senstivity Analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell Stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micro-mirror.
315-316
Li, M.
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Kim, D.H.
ea5b43e9-03ec-4df7-967b-c3591def3784
Lowther, D.A.
cfcdbf42-4450-4742-b6b7-591d16adfdda
Sykulski, J.K.
d6885caf-aaed-4d12-9ef3-46c4c3bbd7fb
Li, M.
72430469-7491-49ea-88a0-9f8aed0abcb7
Kim, D.H.
ea5b43e9-03ec-4df7-967b-c3591def3784
Lowther, D.A.
cfcdbf42-4450-4742-b6b7-591d16adfdda
Sykulski, J.K.
d6885caf-aaed-4d12-9ef3-46c4c3bbd7fb

Li, M., Kim, D.H., Lowther, D.A. and Sykulski, J.K. (2007) A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices. 16th Conference on the Computation of Electromagnetic Fields COMPUMAG, Aachen, Germany. 24 - 27 Jun 2007. pp. 315-316 .

Record type: Conference or Workshop Item (Paper)

Abstract

This paper presents a novel method for the computation of force in an electrostatically operated MEMS device. The approach is based on Continuum Design Senstivity Analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell Stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micro-mirror.

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More information

Published date: 2007
Additional Information: Event Dates: 25 – 28 June 2007
Venue - Dates: 16th Conference on the Computation of Electromagnetic Fields COMPUMAG, Aachen, Germany, 2007-06-24 - 2007-06-27
Organisations: EEE

Identifiers

Local EPrints ID: 264366
URI: http://eprints.soton.ac.uk/id/eprint/264366
PURE UUID: c7aea13a-bf4c-4f6e-8ead-5c1f8a44cf52
ORCID for J.K. Sykulski: ORCID iD orcid.org/0000-0001-6392-126X

Catalogue record

Date deposited: 02 Aug 2007
Last modified: 07 Oct 2020 02:31

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