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An efficient and accurate MEMS accelerometer model with sense finger dynamics for applications in mixed-technology control loops

An efficient and accurate MEMS accelerometer model with sense finger dynamics for applications in mixed-technology control loops
An efficient and accurate MEMS accelerometer model with sense finger dynamics for applications in mixed-technology control loops
This contribution presents a novelMEMS accelerometer model implemented in VHDL-AMS. The model includes sense finger dynamics, which allow accurate performance prediction of a MEMS accelerometer in a mixed-technology control loop. A distributed mechanical sensing element model is developed and the effect of the sense finger dynamics is analyzed. The sense finger dynamics might cause a failure of the Sigma-Delta control loop which is captured by the proposed model but cannot be correctly modeled using the conventional approach.
143-147
Zhao, Chenxu
87d1aa10-ef41-44bc-8969-82626aa1dd92
Wang, Leran
91d2f4ca-ed47-4e47-adff-70fef3874564
Kazmierski, Tom
a97d7958-40c3-413f-924d-84545216092a
Zhao, Chenxu
87d1aa10-ef41-44bc-8969-82626aa1dd92
Wang, Leran
91d2f4ca-ed47-4e47-adff-70fef3874564
Kazmierski, Tom
a97d7958-40c3-413f-924d-84545216092a

Zhao, Chenxu, Wang, Leran and Kazmierski, Tom (2007) An efficient and accurate MEMS accelerometer model with sense finger dynamics for applications in mixed-technology control loops. IEEE Behavioral Modeling and Simulation Conference (BMAS 2007), United States. 20 - 21 Sep 2007. pp. 143-147 .

Record type: Conference or Workshop Item (Other)

Abstract

This contribution presents a novelMEMS accelerometer model implemented in VHDL-AMS. The model includes sense finger dynamics, which allow accurate performance prediction of a MEMS accelerometer in a mixed-technology control loop. A distributed mechanical sensing element model is developed and the effect of the sense finger dynamics is analyzed. The sense finger dynamics might cause a failure of the Sigma-Delta control loop which is captured by the proposed model but cannot be correctly modeled using the conventional approach.

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More information

Published date: 2007
Additional Information: Event Dates: September 20-21, 2007
Venue - Dates: IEEE Behavioral Modeling and Simulation Conference (BMAS 2007), United States, 2007-09-20 - 2007-09-21
Organisations: EEE

Identifiers

Local EPrints ID: 264660
URI: https://eprints.soton.ac.uk/id/eprint/264660
PURE UUID: 03083e3b-4c40-4d7e-b7c9-3d786827b202

Catalogue record

Date deposited: 09 Oct 2007
Last modified: 02 Dec 2019 21:04

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Contributors

Author: Chenxu Zhao
Author: Leran Wang
Author: Tom Kazmierski

University divisions

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