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Design, fabrication and test of integrated micro-scale vibration based electromagnetic generator

Kulkarni, S, Koukharenko, E, Torah, R N, Tudor, M J, Beeby, S P, O'Donnell, T and Roy, S (2008) Design, fabrication and test of integrated micro-scale vibration based electromagnetic generator Sensors and Actuators A: Physical, 145-146, pp. 336-342. (doi:10.1016/j.sna.2007.09.014).

Record type: Article


This paper discusses the design, fabrication and testing of electromagnetic microgenerators. Three different designs of power generators are partially microfabricated and assembled. Prototype A having a wire-wound copper coil, Prototype B, an electrodeposited copper coil both on a Deep Reactive Ion etched (DRIE) silicon, beam and paddle. Prototype C uses moving NdFeB magnets in between two microfabricated coils. The integrated coil, paddle and beam were fabricated using standard micro-Electro-Mechanical Systems (MEMS) processing techniques. For Prototype A, the maximum measured power output was 148 nW at 8.08 kHz resonant frequency and 3.9 m/s2 acceleration. For prototype B, the microgenerator gave a maximum load power of 23 nW for an acceleration of 9.8 m/s2, at a resonant frequency of 9.83 kHz. This is a substantial improvement in power generated over other microfabricated silicon based generators reported in literature. This generator has a volume of 0.1 cm3 which is lowest of all the silicon based microfabricated electromagnetic power generators reported. To verify the potential of integrated coils in electromagnetic generators, Prototype C was assembled. This generated a maximum load power of 58

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e-pub ahead of print date: 29 September 2007
Published date: July 2008
Keywords: Energy Harvesting, Electromagnetic Generator
Organisations: EEE


Local EPrints ID: 264799
ISSN: 0924-4247
PURE UUID: 56ab8246-8aa3-4ac5-b776-41c3c6f56491
ORCID for S P Beeby: ORCID iD

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Date deposited: 07 Nov 2007
Last modified: 18 Jul 2017 07:32

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Author: S Kulkarni
Author: E Koukharenko
Author: R N Torah
Author: M J Tudor
Author: S P Beeby ORCID iD
Author: T O'Donnell
Author: S Roy

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