The University of Southampton
University of Southampton Institutional Repository

Design, fabrication and test of integrated micro-scale vibration based electromagnetic generator

Kulkarni, S, Koukharenko, E, Torah, R N, Tudor, M J, Beeby, S P, O'Donnell, T and Roy, S (2008) Design, fabrication and test of integrated micro-scale vibration based electromagnetic generator Sensors and Actuators A: Physical, 145-146, pp. 336-342. (doi:10.1016/j.sna.2007.09.014).

Record type: Article

Abstract

This paper discusses the design, fabrication and testing of electromagnetic microgenerators. Three different designs of power generators are partially microfabricated and assembled. Prototype A having a wire-wound copper coil, Prototype B, an electrodeposited copper coil both on a Deep Reactive Ion etched (DRIE) silicon, beam and paddle. Prototype C uses moving NdFeB magnets in between two microfabricated coils. The integrated coil, paddle and beam were fabricated using standard micro-Electro-Mechanical Systems (MEMS) processing techniques. For Prototype A, the maximum measured power output was 148 nW at 8.08 kHz resonant frequency and 3.9 m/s2 acceleration. For prototype B, the microgenerator gave a maximum load power of 23 nW for an acceleration of 9.8 m/s2, at a resonant frequency of 9.83 kHz. This is a substantial improvement in power generated over other microfabricated silicon based generators reported in literature. This generator has a volume of 0.1 cm3 which is lowest of all the silicon based microfabricated electromagnetic power generators reported. To verify the potential of integrated coils in electromagnetic generators, Prototype C was assembled. This generated a maximum load power of 58

PDF Vibration-based_generator_2008.pdf - Other
Download (815kB)

More information

e-pub ahead of print date: 29 September 2007
Published date: July 2008
Keywords: Energy Harvesting, Electromagnetic Generator
Organisations: EEE

Identifiers

Local EPrints ID: 264799
URI: http://eprints.soton.ac.uk/id/eprint/264799
ISSN: 0924-4247
PURE UUID: 56ab8246-8aa3-4ac5-b776-41c3c6f56491
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759

Catalogue record

Date deposited: 07 Nov 2007
Last modified: 18 Jul 2017 07:32

Export record

Altmetrics

Contributors

Author: S Kulkarni
Author: E Koukharenko
Author: R N Torah
Author: M J Tudor
Author: S P Beeby ORCID iD
Author: T O'Donnell
Author: S Roy

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×