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Electron-beam writing of photonic crystal patterns using a large beam-spot diameter

Electron-beam writing of photonic crystal patterns using a large beam-spot diameter
Electron-beam writing of photonic crystal patterns using a large beam-spot diameter
0957-4484
1004-1008
Kim, S
a5808ce9-1d34-4e91-b9af-bb1f4ff6c18c
Chong, H
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
De La Rue, R M
f172f931-c862-4a66-a3a4-731e362174da
Marsh, J H
3837e4f1-bbf1-450b-91a5-bb4f00a85e06
Bryce, A C
3aa03b5b-d0db-471c-a96c-fb4ceae57803
Kim, S
a5808ce9-1d34-4e91-b9af-bb1f4ff6c18c
Chong, H
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
De La Rue, R M
f172f931-c862-4a66-a3a4-731e362174da
Marsh, J H
3837e4f1-bbf1-450b-91a5-bb4f00a85e06
Bryce, A C
3aa03b5b-d0db-471c-a96c-fb4ceae57803

Kim, S, Chong, H, De La Rue, R M, Marsh, J H and Bryce, A C (2003) Electron-beam writing of photonic crystal patterns using a large beam-spot diameter. Nanotechnology, 12, 1004-1008.

Record type: Article
Text
ELECTRON-BEAM_WRITING_OF_PHOTONIC_CRYSTAL_PATTERNS_USING_A_LARGE_BEAM-SPOT_DIAMETER_2003.pdf - Other
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More information

Published date: 2003
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 264938
URI: http://eprints.soton.ac.uk/id/eprint/264938
ISSN: 0957-4484
PURE UUID: 3cbea455-b5df-4cc9-99a0-e362fc4c00f3
ORCID for H Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 11 Dec 2007 08:39
Last modified: 08 Oct 2019 00:43

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