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Multifractal properties of Pyrex and silicon surfaces blasted with sharp particles

Multifractal properties of Pyrex and silicon surfaces blasted with sharp particles
Multifractal properties of Pyrex and silicon surfaces blasted with sharp particles
The blasting of brittle materials with sharp particles is an important fabrication technology in many industrial processes. In particular, for microsystems, it allows the production of devices with feature sizes down to few tens of microns. An important parameter of this process is the surface roughness of post-blasted surfaces. In this work the scaling properties of Pyrex glass and silicon surfaces after bombardment with alumina particles are investigated. The targets were bombarded at normal incidence using alumina particles with two different average sizes, 29 ?m and 9 ?m. This investigation indicates that the resulting surfaces are multifractal. Applying multifractal detrended fluctuation analysis (MFDFA) allowed us to determine the singularity spectrum of the surfaces. This spectrum did not depend on the target material or on the size of the particles. Several parameters quantifying relevant quantities were determined. It was found that long range correlations are responsible for the observed multifractal behaviour.
2083-2090
Moktadir, Zakaria
34472668-ffda-4287-8fea-2c4f3bf1e2fa
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Winsink, Henk
e10a22ab-fefb-4a47-8387-64f43a2bee47
Moktadir, Zakaria
34472668-ffda-4287-8fea-2c4f3bf1e2fa
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Winsink, Henk
e10a22ab-fefb-4a47-8387-64f43a2bee47

Moktadir, Zakaria, Kraft, Michael and Winsink, Henk (2008) Multifractal properties of Pyrex and silicon surfaces blasted with sharp particles. Physica A: Statistical Mechanics and its Applications, 387, 2083-2090.

Record type: Article

Abstract

The blasting of brittle materials with sharp particles is an important fabrication technology in many industrial processes. In particular, for microsystems, it allows the production of devices with feature sizes down to few tens of microns. An important parameter of this process is the surface roughness of post-blasted surfaces. In this work the scaling properties of Pyrex glass and silicon surfaces after bombardment with alumina particles are investigated. The targets were bombarded at normal incidence using alumina particles with two different average sizes, 29 ?m and 9 ?m. This investigation indicates that the resulting surfaces are multifractal. Applying multifractal detrended fluctuation analysis (MFDFA) allowed us to determine the singularity spectrum of the surfaces. This spectrum did not depend on the target material or on the size of the particles. Several parameters quantifying relevant quantities were determined. It was found that long range correlations are responsible for the observed multifractal behaviour.

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Published date: 2008
Organisations: Nanoelectronics and Nanotechnology

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Local EPrints ID: 265045
URI: https://eprints.soton.ac.uk/id/eprint/265045
PURE UUID: b616b66a-c81e-4d72-a6bd-5e178bf796da

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Date deposited: 21 Jan 2008 10:10
Last modified: 18 Jul 2019 15:43

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